FR2297093A1 - Procede pour deposer des revetements differents contigus jointifs sur un substrat transparent et produits obtenus - Google Patents

Procede pour deposer des revetements differents contigus jointifs sur un substrat transparent et produits obtenus

Info

Publication number
FR2297093A1
FR2297093A1 FR7600096A FR7600096A FR2297093A1 FR 2297093 A1 FR2297093 A1 FR 2297093A1 FR 7600096 A FR7600096 A FR 7600096A FR 7600096 A FR7600096 A FR 7600096A FR 2297093 A1 FR2297093 A1 FR 2297093A1
Authority
FR
France
Prior art keywords
coating
photo
deposing
procedure
transparent substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7600096A
Other languages
English (en)
French (fr)
Inventor
Horst Enssle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of FR2297093A1 publication Critical patent/FR2297093A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
FR7600096A 1975-01-07 1976-01-05 Procede pour deposer des revetements differents contigus jointifs sur un substrat transparent et produits obtenus Withdrawn FR2297093A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH17775A CH586118A5 (Direct) 1975-01-07 1975-01-07

Publications (1)

Publication Number Publication Date
FR2297093A1 true FR2297093A1 (fr) 1976-08-06

Family

ID=4181012

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7600096A Withdrawn FR2297093A1 (fr) 1975-01-07 1976-01-05 Procede pour deposer des revetements differents contigus jointifs sur un substrat transparent et produits obtenus

Country Status (5)

Country Link
CH (1) CH586118A5 (Direct)
DE (1) DE2557667B2 (Direct)
FR (1) FR2297093A1 (Direct)
GB (1) GB1485097A (Direct)
NL (1) NL7504118A (Direct)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290670A3 (de) * 1987-04-11 1991-01-30 VDO Adolf Schindling AG Verfahren zur Herstellung einer Struktur
EP0556904A1 (en) * 1992-02-20 1993-08-25 Philips Electronics Uk Limited Methods of fabricating thin film structures and structures and display devices produced thereby
EP0598672A1 (en) * 1992-11-13 1994-05-25 International Business Machines Corporation Method of making a rim-type phase-shift mask

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004034417B4 (de) 2004-07-15 2007-09-27 Schott Ag Verfahren zur Herstellung eines beschichteten Substrats mit gewölbter Oberfläche

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH284109A (de) * 1952-02-06 1952-07-15 Ernst Jun Dr Ruest Verfahren zur Herstellung von mit Teilungen, Gittern, Strichzeichnungen, Flächenmarken usw. versehenen Gegenständen.
DE1060717B (de) * 1956-04-13 1959-07-02 Franz Wagner Verfahren zur Herstellung von Rastern, Zeichnungen u. a. auf Filmen, Glaesern und anderen Traegern

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH284109A (de) * 1952-02-06 1952-07-15 Ernst Jun Dr Ruest Verfahren zur Herstellung von mit Teilungen, Gittern, Strichzeichnungen, Flächenmarken usw. versehenen Gegenständen.
DE1060717B (de) * 1956-04-13 1959-07-02 Franz Wagner Verfahren zur Herstellung von Rastern, Zeichnungen u. a. auf Filmen, Glaesern und anderen Traegern

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290670A3 (de) * 1987-04-11 1991-01-30 VDO Adolf Schindling AG Verfahren zur Herstellung einer Struktur
EP0556904A1 (en) * 1992-02-20 1993-08-25 Philips Electronics Uk Limited Methods of fabricating thin film structures and structures and display devices produced thereby
EP0598672A1 (en) * 1992-11-13 1994-05-25 International Business Machines Corporation Method of making a rim-type phase-shift mask
US5484672A (en) * 1992-11-13 1996-01-16 International Business Machines Corporation Method of making a rim-type phase-shift mask

Also Published As

Publication number Publication date
NL7504118A (nl) 1976-07-09
CH586118A5 (Direct) 1977-03-31
GB1485097A (en) 1977-09-08
DE2557667B2 (de) 1978-08-24
DE2557667A1 (de) 1976-07-08

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse