FR2287966A1 - Diviseur de faisceau pour machines de travail a faisceau electronique - Google Patents

Diviseur de faisceau pour machines de travail a faisceau electronique

Info

Publication number
FR2287966A1
FR2287966A1 FR7531727A FR7531727A FR2287966A1 FR 2287966 A1 FR2287966 A1 FR 2287966A1 FR 7531727 A FR7531727 A FR 7531727A FR 7531727 A FR7531727 A FR 7531727A FR 2287966 A1 FR2287966 A1 FR 2287966A1
Authority
FR
France
Prior art keywords
working machines
divider
electronic
electronic beam
beam divider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7531727A
Other languages
English (en)
Other versions
FR2287966B3 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steigerwald Strahltecknik GmbH
Original Assignee
Steigerwald Strahltecknik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steigerwald Strahltecknik GmbH filed Critical Steigerwald Strahltecknik GmbH
Publication of FR2287966A1 publication Critical patent/FR2287966A1/fr
Application granted granted Critical
Publication of FR2287966B3 publication Critical patent/FR2287966B3/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/08—Removing material, e.g. by cutting, by hole drilling
    • B23K15/085—Boring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Cleaning In General (AREA)
FR7531727A 1974-10-16 1975-10-16 Diviseur de faisceau pour machines de travail a faisceau electronique Granted FR2287966A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742449263 DE2449263A1 (de) 1974-10-16 1974-10-16 Strahlteiler fuer elektronenstrahlarbeitsmaschinen

Publications (2)

Publication Number Publication Date
FR2287966A1 true FR2287966A1 (fr) 1976-05-14
FR2287966B3 FR2287966B3 (fr) 1978-07-13

Family

ID=5928441

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7531727A Granted FR2287966A1 (fr) 1974-10-16 1975-10-16 Diviseur de faisceau pour machines de travail a faisceau electronique

Country Status (5)

Country Link
US (1) US4080546A (fr)
JP (1) JPS5165498A (fr)
DE (1) DE2449263A1 (fr)
FR (1) FR2287966A1 (fr)
GB (1) GB1525014A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994005032A1 (fr) * 1992-08-24 1994-03-03 Societe Europeenne De Propulsion, S.A. Systeme d'optique ionique pour une source d'ions a decharge dans un gaz
US6566655B1 (en) 2000-10-24 2003-05-20 Advanced Micro Devices, Inc. Multi-beam SEM for sidewall imaging
US6664545B2 (en) 2001-08-29 2003-12-16 The Board Of Trustees Of The Leland Stanford Junior University Gate for modulating beam of charged particles and method for making same
WO2011034985A1 (fr) 2009-09-17 2011-03-24 Sciaky, Inc. Fabrication de couche de faisceau d'électron
WO2011123195A1 (fr) 2010-03-31 2011-10-06 Sciaky, Inc. Méthodologie de balayage, et appareil et système pour la fabrication de couches par faisceau d'électrons au moyen d'un système de commande en boucle fermée

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE482112A (fr) * 1940-07-23
BE521804A (fr) * 1952-07-30
US2840749A (en) * 1952-10-17 1958-06-24 Bell Telephone Labor Inc Electron discharge devices
NL236168A (fr) * 1958-03-12
US3247420A (en) * 1962-07-16 1966-04-19 Gen Electric Distributed amplifier with inductanceconnected anode segments
US3290540A (en) * 1964-04-16 1966-12-06 Westinghouse Electric Corp Electron discharge tube having a movable cathode tape
US3433955A (en) * 1966-09-26 1969-03-18 Picker Corp X-ray generator with emission control arrangement within the focusing cup
US3506871A (en) * 1967-05-29 1970-04-14 Air Reduction Electron beam gun having elongated tensioned emitter
US3689782A (en) * 1971-07-01 1972-09-05 Thomson Csf Electronic transducer for a piezoelectric line
US3745401A (en) * 1972-02-15 1973-07-10 Atomic Energy Commission Filament support structure for large electron guns

Also Published As

Publication number Publication date
US4080546A (en) 1978-03-21
FR2287966B3 (fr) 1978-07-13
DE2449263A1 (de) 1976-04-22
GB1525014A (en) 1978-09-20
JPS5165498A (en) 1976-06-07

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Legal Events

Date Code Title Description
ST Notification of lapse