FR2281996B1 - - Google Patents

Info

Publication number
FR2281996B1
FR2281996B1 FR7525071A FR7525071A FR2281996B1 FR 2281996 B1 FR2281996 B1 FR 2281996B1 FR 7525071 A FR7525071 A FR 7525071A FR 7525071 A FR7525071 A FR 7525071A FR 2281996 B1 FR2281996 B1 FR 2281996B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7525071A
Other languages
French (fr)
Other versions
FR2281996A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2281996A1 publication Critical patent/FR2281996A1/fr
Application granted granted Critical
Publication of FR2281996B1 publication Critical patent/FR2281996B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
FR7525071A 1974-08-14 1975-08-12 Procede et appareil pour regler la formation des couches lors de la production de couches minces optiquement efficaces Granted FR2281996A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742438963 DE2438963A1 (de) 1974-08-14 1974-08-14 Verfahren und anordnung zur regelung des schichtaufbaus bei der erzeugung optisch wirksamer duennschichten

Publications (2)

Publication Number Publication Date
FR2281996A1 FR2281996A1 (fr) 1976-03-12
FR2281996B1 true FR2281996B1 (de) 1979-04-27

Family

ID=5923159

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7525071A Granted FR2281996A1 (fr) 1974-08-14 1975-08-12 Procede et appareil pour regler la formation des couches lors de la production de couches minces optiquement efficaces

Country Status (3)

Country Link
JP (1) JPS5145683A (de)
DE (1) DE2438963A1 (de)
FR (1) FR2281996A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5852475A (ja) * 1981-09-24 1983-03-28 Ulvac Corp 薄膜形成装置における薄膜監視測定方法およびその装置
FR2816714B1 (fr) * 2000-11-16 2003-10-10 Shakticom Procede et dispositif de depot de couches minces
DE102005010681B4 (de) 2005-03-09 2016-05-04 Leybold Optics Gmbh Messanordnung zum optischen Monitoring von Beschichtungsprozessen

Also Published As

Publication number Publication date
JPS5145683A (en) 1976-04-19
DE2438963A1 (de) 1976-02-26
FR2281996A1 (fr) 1976-03-12

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Legal Events

Date Code Title Description
ST Notification of lapse