JPS5145683A - Kogakusayono hakumakusono keiseijino seigyohohoto sochi - Google Patents

Kogakusayono hakumakusono keiseijino seigyohohoto sochi

Info

Publication number
JPS5145683A
JPS5145683A JP9904075A JP9904075A JPS5145683A JP S5145683 A JPS5145683 A JP S5145683A JP 9904075 A JP9904075 A JP 9904075A JP 9904075 A JP9904075 A JP 9904075A JP S5145683 A JPS5145683 A JP S5145683A
Authority
JP
Japan
Prior art keywords
seigyohohoto
kogakusayono
keiseijino
hakumakusono
sochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9904075A
Other languages
Japanese (ja)
Inventor
Birumansu Ingo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RAIBORUTO HEREEUSU FUERUBARUTSUNGU GmbH
Leybold Heraeus Verwaltung GmbH
Original Assignee
RAIBORUTO HEREEUSU FUERUBARUTSUNGU GmbH
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RAIBORUTO HEREEUSU FUERUBARUTSUNGU GmbH, Leybold Heraeus Verwaltung GmbH filed Critical RAIBORUTO HEREEUSU FUERUBARUTSUNGU GmbH
Publication of JPS5145683A publication Critical patent/JPS5145683A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP9904075A 1974-08-14 1975-08-14 Kogakusayono hakumakusono keiseijino seigyohohoto sochi Pending JPS5145683A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742438963 DE2438963A1 (en) 1974-08-14 1974-08-14 PROCESS AND ARRANGEMENT FOR REGULATING THE STRUCTURE OF THE LAYER IN THE PRODUCTION OF OPTICALLY EFFECTIVE THIN LAYERS

Publications (1)

Publication Number Publication Date
JPS5145683A true JPS5145683A (en) 1976-04-19

Family

ID=5923159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9904075A Pending JPS5145683A (en) 1974-08-14 1975-08-14 Kogakusayono hakumakusono keiseijino seigyohohoto sochi

Country Status (3)

Country Link
JP (1) JPS5145683A (en)
DE (1) DE2438963A1 (en)
FR (1) FR2281996A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5852475A (en) * 1981-09-24 1983-03-28 Ulvac Corp Method and device for monitoring and measuring thin film in thin film former
JP2008533452A (en) * 2005-03-09 2008-08-21 ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング Measuring device for optical monitoring of the lamination process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2816714B1 (en) 2000-11-16 2003-10-10 Shakticom METHOD AND DEVICE FOR DEPOSITING THIN FILMS

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5852475A (en) * 1981-09-24 1983-03-28 Ulvac Corp Method and device for monitoring and measuring thin film in thin film former
JP2008533452A (en) * 2005-03-09 2008-08-21 ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング Measuring device for optical monitoring of the lamination process
JP4898776B2 (en) * 2005-03-09 2012-03-21 ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング Measuring device for optically monitoring a lamination process and method for optically monitoring a lamination process

Also Published As

Publication number Publication date
DE2438963A1 (en) 1976-02-26
FR2281996B1 (en) 1979-04-27
FR2281996A1 (en) 1976-03-12

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