FR2280095B3 - - Google Patents
Info
- Publication number
- FR2280095B3 FR2280095B3 FR7522885A FR7522885A FR2280095B3 FR 2280095 B3 FR2280095 B3 FR 2280095B3 FR 7522885 A FR7522885 A FR 7522885A FR 7522885 A FR7522885 A FR 7522885A FR 2280095 B3 FR2280095 B3 FR 2280095B3
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD18006174A DD114726A1 (enExample) | 1974-07-23 | 1974-07-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2280095A1 FR2280095A1 (fr) | 1976-02-20 |
| FR2280095B3 true FR2280095B3 (enExample) | 1979-04-27 |
Family
ID=5496668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7522885A Granted FR2280095A1 (fr) | 1974-07-23 | 1975-07-22 | Dispositif d'obtention d'un signal lumineux, a partir du faisceau lumineux d'un dispositif de positionnement et d'exposition |
Country Status (5)
| Country | Link |
|---|---|
| CS (1) | CS184959B1 (enExample) |
| DD (1) | DD114726A1 (enExample) |
| DE (1) | DE2527938A1 (enExample) |
| FR (1) | FR2280095A1 (enExample) |
| GB (1) | GB1513433A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928337A (ja) * | 1982-08-09 | 1984-02-15 | Hitachi Ltd | プロジエクシヨンアライナ |
-
1974
- 1974-07-23 DD DD18006174A patent/DD114726A1/xx unknown
-
1975
- 1975-06-23 DE DE19752527938 patent/DE2527938A1/de not_active Withdrawn
- 1975-07-21 CS CS513675A patent/CS184959B1/cs unknown
- 1975-07-22 GB GB3052675A patent/GB1513433A/en not_active Expired
- 1975-07-22 FR FR7522885A patent/FR2280095A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB1513433A (en) | 1978-06-07 |
| DD114726A1 (enExample) | 1975-08-12 |
| FR2280095A1 (fr) | 1976-02-20 |
| CS184959B1 (en) | 1978-09-15 |
| DE2527938A1 (de) | 1976-02-12 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |