FR2279146A1 - Procede et appareil pour aligner un faisceau d'electrons sur un element a irradier - Google Patents

Procede et appareil pour aligner un faisceau d'electrons sur un element a irradier

Info

Publication number
FR2279146A1
FR2279146A1 FR7522600A FR7522600A FR2279146A1 FR 2279146 A1 FR2279146 A1 FR 2279146A1 FR 7522600 A FR7522600 A FR 7522600A FR 7522600 A FR7522600 A FR 7522600A FR 2279146 A1 FR2279146 A1 FR 2279146A1
Authority
FR
France
Prior art keywords
irradier
electrons
aligning
irradier element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7522600A
Other languages
English (en)
French (fr)
Other versions
FR2279146B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of FR2279146A1 publication Critical patent/FR2279146A1/fr
Application granted granted Critical
Publication of FR2279146B1 publication Critical patent/FR2279146B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR7522600A 1974-07-18 1975-07-18 Procede et appareil pour aligner un faisceau d'electrons sur un element a irradier Granted FR2279146A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/489,638 US4008402A (en) 1974-07-18 1974-07-18 Method and apparatus for electron beam alignment with a member by detecting X-rays

Publications (2)

Publication Number Publication Date
FR2279146A1 true FR2279146A1 (fr) 1976-02-13
FR2279146B1 FR2279146B1 (enExample) 1982-10-22

Family

ID=23944663

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7522600A Granted FR2279146A1 (fr) 1974-07-18 1975-07-18 Procede et appareil pour aligner un faisceau d'electrons sur un element a irradier

Country Status (3)

Country Link
US (1) US4008402A (enExample)
JP (1) JPS5311829B2 (enExample)
FR (1) FR2279146A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1557064A (en) * 1976-09-09 1979-12-05 Mullard Ltd Masks suitable for use in electron image projectors
US4088896A (en) * 1976-12-20 1978-05-09 Rockwell International Corporation Actinic radiation emissive pattern defining masks for fine line lithography and lithography utilizing such masks
JPS566438A (en) * 1979-06-27 1981-01-23 Fujitsu Ltd Electron beam exposure
US4238686A (en) * 1979-09-05 1980-12-09 Bell Telephone Laboratories, Incorporated Method of analyzing localized nonuniformities in luminescing materials
FR2515870A1 (fr) * 1981-11-04 1983-05-06 Labo Electronique Physique Photocathode pour entree de tube electronique comportant un dispositif semi-conducteur avec photo-emission par transmission
US4572956A (en) * 1982-08-31 1986-02-25 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam pattern transfer system having an autofocusing mechanism
JPS6180879U (enExample) * 1984-11-01 1986-05-29
US4871919A (en) * 1988-05-20 1989-10-03 International Business Machines Corporation Electron beam lithography alignment using electric field changes to achieve registration
JPH02178422A (ja) * 1988-12-28 1990-07-11 Arai Kensetsu Kk 擁壁及び用水壁頭部
JPH02231708A (ja) * 1989-03-06 1990-09-13 Fujitsu Ltd 半導体装置の位置合わせマーク検出方法及び装置
US4928018A (en) * 1989-06-29 1990-05-22 Texas Instruments, Incorporated Thermo-enhanced electron image projector
US20040213129A1 (en) * 2003-04-25 2004-10-28 Marshall Daniel R. Emitter cluster for a data storage device
DE102006030874B4 (de) * 2006-07-04 2013-03-14 Pro-Beam Ag & Co. Kgaa Verfahren und Vorrichtung zur Bearbeitung von Werkstücken
CN102969302B (zh) * 2012-11-21 2015-08-26 华中科技大学 基于二氧化铪的电子束套刻标记及其制作方法
US9909972B2 (en) * 2016-02-08 2018-03-06 MANTA Instruments, Inc. Multi-camera apparatus for observation of microscopic movements and counting of particles in colloids and its calibration
JP7042071B2 (ja) * 2016-12-20 2022-03-25 エフ・イ－・アイ・カンパニー ｅビーム操作用の局部的に排気された容積を用いる集積回路解析システムおよび方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2111008A5 (enExample) * 1970-10-06 1972-06-02 Westinghouse Electric Corp
FR2146106A1 (enExample) * 1971-07-16 1973-03-02 Thomson Csf

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3081414A (en) * 1959-03-20 1963-03-12 David M Goodman Wide band cathode ray tubes and the like
US3691424A (en) * 1961-01-27 1972-09-12 David M Goodman Target screens for cathode ray tubes utilizing index generating materials that emit x-rays
US3842279A (en) * 1970-11-06 1974-10-15 Westinghouse Electric Corp Method and apparatus for aligning a charged particle beam
US3840749A (en) * 1973-06-19 1974-10-08 Westinghouse Electric Corp Method and apparatus for electron beam alignment with a semiconductor member

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2111008A5 (enExample) * 1970-10-06 1972-06-02 Westinghouse Electric Corp
FR2146106A1 (enExample) * 1971-07-16 1973-03-02 Thomson Csf

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NV700/68 *

Also Published As

Publication number Publication date
FR2279146B1 (enExample) 1982-10-22
US4008402A (en) 1977-02-15
JPS5311829B2 (enExample) 1978-04-25
JPS5134673A (enExample) 1976-03-24

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Legal Events

Date Code Title Description
ST Notification of lapse