FR2265083A2 - Pressure measuring sensor - has integrated circuit on a thin substrate forming small transducers - Google Patents
Pressure measuring sensor - has integrated circuit on a thin substrate forming small transducersInfo
- Publication number
- FR2265083A2 FR2265083A2 FR7409645A FR7409645A FR2265083A2 FR 2265083 A2 FR2265083 A2 FR 2265083A2 FR 7409645 A FR7409645 A FR 7409645A FR 7409645 A FR7409645 A FR 7409645A FR 2265083 A2 FR2265083 A2 FR 2265083A2
- Authority
- FR
- France
- Prior art keywords
- integrated circuit
- sensor
- measuring sensor
- pressure measuring
- substrate forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000005530 etching Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
- A61B5/021—Measuring pressure in heart or blood vessels
- A61B5/0215—Measuring pressure in heart or blood vessels by means inserted into the body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Cardiology (AREA)
- General Physics & Mathematics (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Physiology (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Vascular Medicine (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7409645A FR2265083A2 (en) | 1974-03-21 | 1974-03-21 | Pressure measuring sensor - has integrated circuit on a thin substrate forming small transducers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7409645A FR2265083A2 (en) | 1974-03-21 | 1974-03-21 | Pressure measuring sensor - has integrated circuit on a thin substrate forming small transducers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2265083A2 true FR2265083A2 (en) | 1975-10-17 |
| FR2265083B2 FR2265083B2 (oth) | 1977-10-14 |
Family
ID=9136657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7409645A Granted FR2265083A2 (en) | 1974-03-21 | 1974-03-21 | Pressure measuring sensor - has integrated circuit on a thin substrate forming small transducers |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2265083A2 (oth) |
-
1974
- 1974-03-21 FR FR7409645A patent/FR2265083A2/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2265083B2 (oth) | 1977-10-14 |
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