FR2262405A1 - Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber - Google Patents

Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber

Info

Publication number
FR2262405A1
FR2262405A1 FR7406467A FR7406467A FR2262405A1 FR 2262405 A1 FR2262405 A1 FR 2262405A1 FR 7406467 A FR7406467 A FR 7406467A FR 7406467 A FR7406467 A FR 7406467A FR 2262405 A1 FR2262405 A1 FR 2262405A1
Authority
FR
France
Prior art keywords
cleaning
manufacture
heating
fast switching
use same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7406467A
Other languages
English (en)
French (fr)
Other versions
FR2262405B3 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cegelec SA
Original Assignee
Cegelec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cegelec SA filed Critical Cegelec SA
Priority to FR7406467A priority Critical patent/FR2262405A1/fr
Publication of FR2262405A1 publication Critical patent/FR2262405A1/fr
Application granted granted Critical
Publication of FR2262405B3 publication Critical patent/FR2262405B3/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Thyristors (AREA)
FR7406467A 1974-02-26 1974-02-26 Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber Granted FR2262405A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7406467A FR2262405A1 (en) 1974-02-26 1974-02-26 Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7406467A FR2262405A1 (en) 1974-02-26 1974-02-26 Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber

Publications (2)

Publication Number Publication Date
FR2262405A1 true FR2262405A1 (en) 1975-09-19
FR2262405B3 FR2262405B3 (enrdf_load_stackoverflow) 1976-12-03

Family

ID=9135454

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7406467A Granted FR2262405A1 (en) 1974-02-26 1974-02-26 Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber

Country Status (1)

Country Link
FR (1) FR2262405A1 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
FR2262405B3 (enrdf_load_stackoverflow) 1976-12-03

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Legal Events

Date Code Title Description
TP Transmission of property