FR2260187B1 - - Google Patents

Info

Publication number
FR2260187B1
FR2260187B1 FR7403570A FR7403570A FR2260187B1 FR 2260187 B1 FR2260187 B1 FR 2260187B1 FR 7403570 A FR7403570 A FR 7403570A FR 7403570 A FR7403570 A FR 7403570A FR 2260187 B1 FR2260187 B1 FR 2260187B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7403570A
Other languages
French (fr)
Other versions
FR2260187A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR7403570A priority Critical patent/FR2260187A1/fr
Publication of FR2260187A1 publication Critical patent/FR2260187A1/fr
Application granted granted Critical
Publication of FR2260187B1 publication Critical patent/FR2260187B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/263Bombardment with radiation with high-energy radiation
    • H01L21/265Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/266Bombardment with radiation with high-energy radiation producing ion implantation using masks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Drying Of Semiconductors (AREA)
FR7403570A 1974-02-04 1974-02-04 Masking a semiconductor for ion implantation - avoiding use of strong acids for removal for window etching Granted FR2260187A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7403570A FR2260187A1 (en) 1974-02-04 1974-02-04 Masking a semiconductor for ion implantation - avoiding use of strong acids for removal for window etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7403570A FR2260187A1 (en) 1974-02-04 1974-02-04 Masking a semiconductor for ion implantation - avoiding use of strong acids for removal for window etching

Publications (2)

Publication Number Publication Date
FR2260187A1 FR2260187A1 (en) 1975-08-29
FR2260187B1 true FR2260187B1 (enrdf_load_stackoverflow) 1977-09-16

Family

ID=9134406

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7403570A Granted FR2260187A1 (en) 1974-02-04 1974-02-04 Masking a semiconductor for ion implantation - avoiding use of strong acids for removal for window etching

Country Status (1)

Country Link
FR (1) FR2260187A1 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2945854A1 (de) * 1979-11-13 1981-05-21 Deutsche Itt Industries Gmbh, 7800 Freiburg Ionenimplantationsverfahren
DE3016050C2 (de) * 1980-04-25 1985-08-29 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung von Fotolackstrukturen für integrierte Halbleiterschaltungsanordnungen

Also Published As

Publication number Publication date
FR2260187A1 (en) 1975-08-29

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Legal Events

Date Code Title Description
ST Notification of lapse