Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Elektromat VEB
Original Assignee
Elektromat VEB
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Filing date
Publication date
Application filed by Elektromat VEBfiledCriticalElektromat VEB
Publication of FR2257146A1publicationCriticalpatent/FR2257146A1/fr
Application grantedgrantedCritical
Publication of FR2257146B3publicationCriticalpatent/FR2257146B3/fr
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Engineering & Computer Science
(AREA)
Physics & Mathematics
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Condensed Matter Physics & Semiconductors
(AREA)
General Physics & Mathematics
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Manufacturing & Machinery
(AREA)
Computer Hardware Design
(AREA)
Microelectronics & Electronic Packaging
(AREA)
Power Engineering
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Exposure And Positioning Against Photoresist Photosensitive Materials
(AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure
(AREA)