DD109125A1 - - Google Patents

Info

Publication number
DD109125A1
DD109125A1 DD17590474A DD17590474A DD109125A1 DD 109125 A1 DD109125 A1 DD 109125A1 DD 17590474 A DD17590474 A DD 17590474A DD 17590474 A DD17590474 A DD 17590474A DD 109125 A1 DD109125 A1 DD 109125A1
Authority
DD
German Democratic Republic
Application number
DD17590474A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD17590474A priority Critical patent/DD109125A1/xx
Publication of DD109125A1 publication Critical patent/DD109125A1/xx
Priority to DE19742455817 priority patent/DE2455817A1/de
Priority to FR7442561A priority patent/FR2257146B3/fr
Priority to GB5564174A priority patent/GB1472099A/en
Priority to CS17875A priority patent/CS177580B1/cs

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DD17590474A 1974-01-09 1974-01-09 DD109125A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DD17590474A DD109125A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-09 1974-01-09
DE19742455817 DE2455817A1 (de) 1974-01-09 1974-11-26 Verfahren zum umsetzen von halbleiterscheiben in einer nach dem kontaktprinzip arbeitenden positionier- und belichtungsvorrichtung mit mehreren bearbeitungsstationen
FR7442561A FR2257146B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-09 1974-12-23
GB5564174A GB1472099A (en) 1974-01-09 1974-12-23 Method of transferring positioning and exposing semiconductor slices in a positioning and contact printing machine
CS17875A CS177580B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-09 1975-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD17590474A DD109125A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-09 1974-01-09

Publications (1)

Publication Number Publication Date
DD109125A1 true DD109125A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-10-12

Family

ID=5494267

Family Applications (1)

Application Number Title Priority Date Filing Date
DD17590474A DD109125A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-09 1974-01-09

Country Status (5)

Country Link
CS (1) CS177580B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DD (1) DD109125A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2455817A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2257146B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1472099A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
FR2257146A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-08-01
GB1472099A (en) 1977-04-27
CS177580B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-07-29
FR2257146B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-09-23
DE2455817A1 (de) 1975-07-17

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