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H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Engineering & Computer Science
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Physics & Mathematics
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Condensed Matter Physics & Semiconductors
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General Physics & Mathematics
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Manufacturing & Machinery
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Computer Hardware Design
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Microelectronics & Electronic Packaging
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Power Engineering
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Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure
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Exposure And Positioning Against Photoresist Photosensitive Materials
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