FR2233791B1 - - Google Patents

Info

Publication number
FR2233791B1
FR2233791B1 FR7420769A FR7420769A FR2233791B1 FR 2233791 B1 FR2233791 B1 FR 2233791B1 FR 7420769 A FR7420769 A FR 7420769A FR 7420769 A FR7420769 A FR 7420769A FR 2233791 B1 FR2233791 B1 FR 2233791B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7420769A
Other languages
French (fr)
Other versions
FR2233791A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00402239A external-priority patent/US3832561A/en
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of FR2233791A1 publication Critical patent/FR2233791A1/fr
Application granted granted Critical
Publication of FR2233791B1 publication Critical patent/FR2233791B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
FR7420769A 1973-06-15 1974-06-14 Expired FR2233791B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US37048973A 1973-06-15 1973-06-15
US00402239A US3832561A (en) 1973-10-01 1973-10-01 Method and apparatus for electron beam alignment with a substrate by schottky barrier contacts

Publications (2)

Publication Number Publication Date
FR2233791A1 FR2233791A1 (en) 1975-01-10
FR2233791B1 true FR2233791B1 (en) 1978-10-27

Family

ID=27004972

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7420769A Expired FR2233791B1 (en) 1973-06-15 1974-06-14

Country Status (5)

Country Link
JP (1) JPS5035799A (en)
CA (1) CA1005174A (en)
DE (1) DE2428041A1 (en)
FR (1) FR2233791B1 (en)
GB (1) GB1468892A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101116321B1 (en) * 2009-08-21 2012-03-09 에이피시스템 주식회사 Method for aligning a substrate
CN111128829B (en) * 2019-12-23 2022-07-19 上海华力微电子有限公司 Alignment method and calibration method

Also Published As

Publication number Publication date
DE2428041A1 (en) 1975-03-20
CA1005174A (en) 1977-02-08
JPS5035799A (en) 1975-04-04
FR2233791A1 (en) 1975-01-10
GB1468892A (en) 1977-03-30

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Legal Events

Date Code Title Description
ST Notification of lapse