JPS5035799A - - Google Patents
Info
- Publication number
- JPS5035799A JPS5035799A JP49067254A JP6725474A JPS5035799A JP S5035799 A JPS5035799 A JP S5035799A JP 49067254 A JP49067254 A JP 49067254A JP 6725474 A JP6725474 A JP 6725474A JP S5035799 A JPS5035799 A JP S5035799A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37048973A | 1973-06-15 | 1973-06-15 | |
| US00402239A US3832561A (en) | 1973-10-01 | 1973-10-01 | Method and apparatus for electron beam alignment with a substrate by schottky barrier contacts |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5035799A true JPS5035799A (ja) | 1975-04-04 |
Family
ID=27004972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49067254A Pending JPS5035799A (ja) | 1973-06-15 | 1974-06-14 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5035799A (ja) |
| CA (1) | CA1005174A (ja) |
| DE (1) | DE2428041A1 (ja) |
| FR (1) | FR2233791B1 (ja) |
| GB (1) | GB1468892A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101116321B1 (ko) * | 2009-08-21 | 2012-03-09 | 에이피시스템 주식회사 | 기판 정렬 방법 |
| CN111128829B (zh) * | 2019-12-23 | 2022-07-19 | 上海华力微电子有限公司 | 对准方法及校准方法 |
-
1974
- 1974-06-03 GB GB2445774A patent/GB1468892A/en not_active Expired
- 1974-06-10 CA CA202,050A patent/CA1005174A/en not_active Expired
- 1974-06-11 DE DE19742428041 patent/DE2428041A1/de not_active Withdrawn
- 1974-06-14 JP JP49067254A patent/JPS5035799A/ja active Pending
- 1974-06-14 FR FR7420769A patent/FR2233791B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1468892A (en) | 1977-03-30 |
| FR2233791B1 (ja) | 1978-10-27 |
| FR2233791A1 (ja) | 1975-01-10 |
| CA1005174A (en) | 1977-02-08 |
| DE2428041A1 (de) | 1975-03-20 |