FR2206527B1 - - Google Patents

Info

Publication number
FR2206527B1
FR2206527B1 FR7334210A FR7334210A FR2206527B1 FR 2206527 B1 FR2206527 B1 FR 2206527B1 FR 7334210 A FR7334210 A FR 7334210A FR 7334210 A FR7334210 A FR 7334210A FR 2206527 B1 FR2206527 B1 FR 2206527B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7334210A
Other languages
French (fr)
Other versions
FR2206527A1 (ja
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2206527A1 publication Critical patent/FR2206527A1/fr
Application granted granted Critical
Publication of FR2206527B1 publication Critical patent/FR2206527B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
FR7334210A 1972-11-13 1973-09-19 Expired FR2206527B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US30623472A 1972-11-13 1972-11-13

Publications (2)

Publication Number Publication Date
FR2206527A1 FR2206527A1 (ja) 1974-06-07
FR2206527B1 true FR2206527B1 (ja) 1978-01-13

Family

ID=23184410

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7334210A Expired FR2206527B1 (ja) 1972-11-13 1973-09-19

Country Status (5)

Country Link
JP (1) JPS4979525A (ja)
CA (1) CA1286905C (ja)
DE (1) DE2355701A1 (ja)
FR (1) FR2206527B1 (ja)
GB (1) GB1421805A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3893127A (en) * 1973-09-27 1975-07-01 Rca Corp Electron beam recording media
KR880701400A (ko) * 1986-03-24 1988-07-26 엘리 와이스 집적 회로 장치의 제조방법
DE19917790A1 (de) * 1999-04-20 2000-11-02 Hoechst Trespaphan Gmbh Biaxial orientierte Folie für die Herstellung von Keramikkondensatoren

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535137A (en) * 1967-01-13 1970-10-20 Ibm Method of fabricating etch resistant masks
SE391405B (sv) * 1972-05-01 1977-02-14 Western Electric Co Forfarande for astadkommande av resistmonster pa ett substrat

Also Published As

Publication number Publication date
DE2355701A1 (de) 1974-05-16
JPS4979525A (ja) 1974-08-01
FR2206527A1 (ja) 1974-06-07
GB1421805A (en) 1976-01-21
CA1286905C (en) 1991-07-30

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Legal Events

Date Code Title Description
ST Notification of lapse