FR2191626A5 - - Google Patents

Info

Publication number
FR2191626A5
FR2191626A5 FR7323813A FR7323813A FR2191626A5 FR 2191626 A5 FR2191626 A5 FR 2191626A5 FR 7323813 A FR7323813 A FR 7323813A FR 7323813 A FR7323813 A FR 7323813A FR 2191626 A5 FR2191626 A5 FR 2191626A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7323813A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Application granted granted Critical
Publication of FR2191626A5 publication Critical patent/FR2191626A5/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
FR7323813A 1972-06-28 1973-06-27 Expired FR2191626A5 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722231654 DE2231654A1 (de) 1972-06-28 1972-06-28 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
FR2191626A5 true FR2191626A5 (xx) 1974-02-01

Family

ID=5849084

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7323813A Expired FR2191626A5 (xx) 1972-06-28 1973-06-27

Country Status (2)

Country Link
DE (1) DE2231654A1 (xx)
FR (1) FR2191626A5 (xx)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0081890A1 (en) * 1981-12-14 1983-06-22 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
WO2001011240A1 (de) * 1999-08-07 2001-02-15 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven elementen
EP1167773A3 (en) * 2000-06-23 2002-02-27 Ebara Corporation Turbo-molecular pump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065077B2 (ja) * 1985-04-30 1994-01-19 株式会社島津製作所 ターボ分子ポンプ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0081890A1 (en) * 1981-12-14 1983-06-22 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
WO2001011240A1 (de) * 1999-08-07 2001-02-15 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven elementen
EP1167773A3 (en) * 2000-06-23 2002-02-27 Ebara Corporation Turbo-molecular pump
US6468030B2 (en) 2000-06-23 2002-10-22 Ebara Corporation Turbo-molecular pump

Also Published As

Publication number Publication date
DE2231654A1 (de) 1974-01-17

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Legal Events

Date Code Title Description
ST Notification of lapse