FR2184829B1 - - Google Patents

Info

Publication number
FR2184829B1
FR2184829B1 FR7317451A FR7317451A FR2184829B1 FR 2184829 B1 FR2184829 B1 FR 2184829B1 FR 7317451 A FR7317451 A FR 7317451A FR 7317451 A FR7317451 A FR 7317451A FR 2184829 B1 FR2184829 B1 FR 2184829B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7317451A
Other languages
French (fr)
Other versions
FR2184829A1 (US07696358-20100413-C00002.png
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of FR2184829A1 publication Critical patent/FR2184829A1/fr
Application granted granted Critical
Publication of FR2184829B1 publication Critical patent/FR2184829B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02071Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02001Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02011Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/0209Low-coherence interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/19Dichroism
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15Cat eye, i.e. reflection always parallel to incoming beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR7317451A 1972-05-15 1973-05-15 Expired FR2184829B1 (US07696358-20100413-C00002.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25330372A 1972-05-15 1972-05-15

Publications (2)

Publication Number Publication Date
FR2184829A1 FR2184829A1 (US07696358-20100413-C00002.png) 1973-12-28
FR2184829B1 true FR2184829B1 (US07696358-20100413-C00002.png) 1974-05-17

Family

ID=22959706

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7317451A Expired FR2184829B1 (US07696358-20100413-C00002.png) 1972-05-15 1973-05-15

Country Status (5)

Country Link
JP (1) JPS4956645A (US07696358-20100413-C00002.png)
CA (1) CA979638A (US07696358-20100413-C00002.png)
DE (1) DE2324502A1 (US07696358-20100413-C00002.png)
FR (1) FR2184829B1 (US07696358-20100413-C00002.png)
GB (1) GB1428813A (US07696358-20100413-C00002.png)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124834A (ja) * 1984-11-21 1986-06-12 Sharp Corp 光応用センサ
JPS62502563A (ja) * 1985-04-24 1987-10-01 ナウチノ−テフニチエスコエ オビエデイネニエ アカデミイ ナウク エスエスエスエ−ル 干渉偏光屈折計
FR2685763B1 (fr) * 1991-12-27 1994-03-25 Aime Vareille Procede et dispositif optiques de mesure de distance et leur application au positionnement relatif de pieces.
US5867271A (en) * 1993-11-17 1999-02-02 Advantest Corporation Michelson interferometer including a non-polarizing beam splitter
JP6533632B1 (ja) 2019-03-15 2019-06-19 日本分光株式会社 円二色性測定装置および円二色性測定方法

Also Published As

Publication number Publication date
DE2324502A1 (de) 1973-11-29
JPS4956645A (US07696358-20100413-C00002.png) 1974-06-01
GB1428813A (en) 1976-03-17
CA979638A (en) 1975-12-16
FR2184829A1 (US07696358-20100413-C00002.png) 1973-12-28

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Legal Events

Date Code Title Description
ST Notification of lapse