FR2169816B1 - - Google Patents

Info

Publication number
FR2169816B1
FR2169816B1 FR7244453A FR7244453A FR2169816B1 FR 2169816 B1 FR2169816 B1 FR 2169816B1 FR 7244453 A FR7244453 A FR 7244453A FR 7244453 A FR7244453 A FR 7244453A FR 2169816 B1 FR2169816 B1 FR 2169816B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7244453A
Other versions
FR2169816A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zumbach Electronic Automatic
Original Assignee
Zumbach Electronic Automatic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zumbach Electronic Automatic filed Critical Zumbach Electronic Automatic
Publication of FR2169816A1 publication Critical patent/FR2169816A1/fr
Application granted granted Critical
Publication of FR2169816B1 publication Critical patent/FR2169816B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness
    • G01B13/06—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/107—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/62—Support for workpiece air film or bearing with positive or negative pressure
FR7244453A 1971-12-07 1972-12-13 Expired FR2169816B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1778071A CH559348A5 (fr) 1971-12-07 1971-12-07

Publications (2)

Publication Number Publication Date
FR2169816A1 FR2169816A1 (fr) 1973-09-14
FR2169816B1 true FR2169816B1 (fr) 1975-04-11

Family

ID=4428054

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7244453A Expired FR2169816B1 (fr) 1971-12-07 1972-12-13

Country Status (11)

Country Link
US (1) US3884076A (fr)
JP (1) JPS5648801B2 (fr)
AT (1) AT367906B (fr)
BE (1) BE792177A (fr)
CA (1) CA994096A (fr)
CH (1) CH559348A5 (fr)
DE (1) DE2258022A1 (fr)
FR (1) FR2169816B1 (fr)
GB (1) GB1406274A (fr)
IT (1) IT971434B (fr)
SE (1) SE382688B (fr)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2407065C2 (de) * 1974-02-14 1984-10-18 Messer Griesheim Gmbh, 6000 Frankfurt Einrichtung zur kapazitiven Abstandsmessung
SE415801C (sv) * 1979-01-30 1982-10-07 Per Roode Berglund Sjelvstabiliserande pneumatisk legesgivare
US4223479A (en) * 1979-07-10 1980-09-23 The Board Of Regents Of The University Of Nebraska Feedback controlled roller applicator
FR2499711B1 (fr) * 1981-02-09 1987-05-15 Siderurgie Fse Inst Rech Dispositif de mesure de l'epaisseur d'un objet et application dudit dispositif
US4641092A (en) * 1982-07-08 1987-02-03 Sumitomo Metal Industries, Ltd. Rotary probe apparatus for detecting flaws in a test object
DE3247697A1 (de) * 1982-12-20 1984-06-20 Schweizerische Aluminium Ag, Chippis Vorrichtung zum bestimmen und/oder messen der form eines werkstueckes
GB2136128B (en) * 1983-03-01 1986-10-22 British Steel Corp Improvements in or relating to the measurement of surface profile
SE444861B (sv) * 1984-09-10 1986-05-12 Per Roode Berglund Beroringsfri banspenningsmetare
US4607525A (en) * 1984-10-09 1986-08-26 General Signal Corporation Height measuring system
EP0214100A1 (fr) * 1985-09-02 1987-03-11 Alcan Rorschach AG Procédé de mesure sans contact d'une distance, dispositif de mesure d'une distance, procédé de mesure continue de la planéité de feuilles, dispositif de mesure de la planéité de feuilles et procédé de mesure de l'épaisseur d'un solide
US4742299A (en) * 1986-10-15 1988-05-03 The United States Of America As Represented By The Department Of Energy Methods of and apparatus for levitating an eddy current probe
DE3703528C1 (de) * 1987-02-03 1987-09-03 Mannesmann Ag Verfahren zur UEberwachung von Rollen in Stranggiessanlagen und Vorrichtung zur Durchfuehrung des Verfahrens
GB8722871D0 (en) * 1987-09-29 1987-11-04 Bnf Metals Tech Centre Measuring apparatus
DE3814697A1 (de) * 1988-04-30 1989-11-09 Wernicke & Co Gmbh Verfahren und einrichtung zum abtasten des umfangs einer schablone, eines brillenglases oder des nutenbodens einer brillengestelloeffnung zum gewinnen von koordinatenwerten in der ebene der schablone, des brillenglases oder der brillengestelloeffnung
US4854156A (en) * 1989-01-03 1989-08-08 Systems Research Laboratories, Inc. Pneumatic surface-following control system
US4977777A (en) * 1989-02-09 1990-12-18 The United States Of America As Represented By The United States Department Of Energy Non-contact contour gage
US4977853A (en) * 1989-06-01 1990-12-18 E. I. Du Pont De Nemours And Company Non-contact wet or dry film thickness measuring device
DE4011646A1 (de) * 1990-04-11 1991-10-24 Micro Epsilon Messtechnik Dickenmesseinrichtung
US5389875A (en) * 1993-03-19 1995-02-14 Grumman Aerospace Corporation Apparatus for non-destructive testing of dielectric/magnetic materials
DE19511939C2 (de) * 1995-03-31 2000-05-18 Micro Epsilon Messtechnik Sensor zur berührungslosen Dickenmessung an Folien
IT1282789B1 (it) * 1996-06-07 1998-03-31 Electronic Systems Spa Dispositivo di misurazione senza contatto di spessore per materiali non metallici in film,fogli,nastri o simili
US6318153B1 (en) 1996-09-30 2001-11-20 Micro-Epsilon Messtechnik Gmbh & Co. Kg Non-contact film thickness gauging sensor
SE515644C2 (sv) * 2000-01-14 2001-09-17 D A Production Ab Mätanordning med ett rörligt lagrat givarhuvud
US6220080B1 (en) * 2000-05-12 2001-04-24 Sigma Tech, Inc. Extended range and ultra precision non contact dimensional gauge for ultra thin wafers and work pieces
DE10123975A1 (de) * 2001-05-17 2002-12-05 Framatome Anp Gmbh Meßkopf, insbesondere zum Einsatz bei der Vermessung eines Brennstabs, eines Brennelementkastens und/oder eines Abstandshalters oder sonstige Strukturteile in einem Brennelement einer kerntechnischen Anlage
US6895066B1 (en) 2001-05-17 2005-05-17 Framatome Anp Gmbh Measuring head and measuring assembly for a nuclear fuel rod
SE527204C2 (sv) * 2004-05-28 2006-01-17 Daprox Ab Mätanordning och förfarande
DE102006022882B4 (de) 2006-05-15 2016-04-14 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3194055A (en) * 1963-05-06 1965-07-13 Knobel Max Work dimension and position detecting, indicating and controlling method and apparatus
US3472061A (en) * 1963-06-03 1969-10-14 Ingf A Alfredeen Ab Transmitting element for gauging instruments
GB1200213A (en) * 1966-08-19 1970-07-29 Yawata Iron & Steel Co Fluid gauges
US3513555A (en) * 1967-03-30 1970-05-26 Bradstreet J Vachon Thickness gauging apparatus
US3617872A (en) * 1969-10-06 1971-11-02 Indev Inc Magnetic thickness gauge with a gas-supported sensor and a suction source in the base

Also Published As

Publication number Publication date
IT971434B (it) 1974-04-30
JPS4865956A (fr) 1973-09-10
ATA1013472A (de) 1981-12-15
FR2169816A1 (fr) 1973-09-14
GB1406274A (en) 1975-09-17
US3884076A (en) 1975-05-20
DE2258022A1 (de) 1973-06-14
JPS5648801B2 (fr) 1981-11-18
AT367906B (de) 1982-08-10
BE792177A (fr) 1973-03-30
CA994096A (en) 1976-08-03
SE382688B (sv) 1976-02-09
CH559348A5 (fr) 1975-02-28

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Legal Events

Date Code Title Description
ST Notification of lapse