FR2163559A1 - - Google Patents

Info

Publication number
FR2163559A1
FR2163559A1 FR7244330A FR7244330A FR2163559A1 FR 2163559 A1 FR2163559 A1 FR 2163559A1 FR 7244330 A FR7244330 A FR 7244330A FR 7244330 A FR7244330 A FR 7244330A FR 2163559 A1 FR2163559 A1 FR 2163559A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7244330A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2163559A1 publication Critical patent/FR2163559A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H10W46/00—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • H10P95/00—
    • H10W46/501—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
FR7244330A 1971-12-13 1972-12-13 Withdrawn FR2163559A1 (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5776971 1971-12-13

Publications (1)

Publication Number Publication Date
FR2163559A1 true FR2163559A1 (OSRAM) 1973-07-27

Family

ID=10479987

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7244330A Withdrawn FR2163559A1 (OSRAM) 1971-12-13 1972-12-13

Country Status (7)

Country Link
JP (1) JPS4873079A (OSRAM)
CA (1) CA970080A (OSRAM)
DE (1) DE2258057A1 (OSRAM)
FR (1) FR2163559A1 (OSRAM)
GB (1) GB1336626A (OSRAM)
IT (1) IT976005B (OSRAM)
NL (1) NL7216663A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4460831A (en) * 1981-11-30 1984-07-17 Thermo Electron Corporation Laser stimulated high current density photoelectron generator and method of manufacture

Also Published As

Publication number Publication date
GB1336626A (en) 1973-11-07
IT976005B (it) 1974-08-20
JPS4873079A (OSRAM) 1973-10-02
CA970080A (en) 1975-06-24
NL7216663A (OSRAM) 1973-06-15
DE2258057A1 (de) 1973-06-20

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Legal Events

Date Code Title Description
ST Notification of lapse