FR2162910A5 - - Google Patents

Info

Publication number
FR2162910A5
FR2162910A5 FR7240010A FR7240010A FR2162910A5 FR 2162910 A5 FR2162910 A5 FR 2162910A5 FR 7240010 A FR7240010 A FR 7240010A FR 7240010 A FR7240010 A FR 7240010A FR 2162910 A5 FR2162910 A5 FR 2162910A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7240010A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Application granted granted Critical
Publication of FR2162910A5 publication Critical patent/FR2162910A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/22—Exposing sequentially with the same light pattern different positions of the same surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR7240010A 1971-11-12 1972-11-10 Expired FR2162910A5 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10510671U JPS527202Y2 (ja) 1971-11-12 1971-11-12

Publications (1)

Publication Number Publication Date
FR2162910A5 true FR2162910A5 (ja) 1973-07-20

Family

ID=14398595

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7240010A Expired FR2162910A5 (ja) 1971-11-12 1972-11-10

Country Status (4)

Country Link
JP (1) JPS527202Y2 (ja)
DE (1) DE2255063A1 (ja)
FR (1) FR2162910A5 (ja)
GB (1) GB1409255A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4012208C1 (en) * 1990-04-14 1991-10-17 Krause-Biagosch Gmbh, 4800 Bielefeld, De Printing plate exposure system - incorporates spring mechanism on suction frame

Also Published As

Publication number Publication date
JPS527202Y2 (ja) 1977-02-16
JPS4860602U (ja) 1973-08-02
DE2255063A1 (de) 1973-05-17
GB1409255A (en) 1975-10-08

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Legal Events

Date Code Title Description
ST Notification of lapse