FR2154459B1 - - Google Patents

Info

Publication number
FR2154459B1
FR2154459B1 FR7231325A FR7231325A FR2154459B1 FR 2154459 B1 FR2154459 B1 FR 2154459B1 FR 7231325 A FR7231325 A FR 7231325A FR 7231325 A FR7231325 A FR 7231325A FR 2154459 B1 FR2154459 B1 FR 2154459B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7231325A
Other versions
FR2154459A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2154459A1 publication Critical patent/FR2154459A1/fr
Application granted granted Critical
Publication of FR2154459B1 publication Critical patent/FR2154459B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
FR7231325A 1971-09-28 1972-08-29 Expired FR2154459B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18440571A 1971-09-28 1971-09-28

Publications (2)

Publication Number Publication Date
FR2154459A1 FR2154459A1 (fr) 1973-05-11
FR2154459B1 true FR2154459B1 (fr) 1974-08-19

Family

ID=22676735

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7231325A Expired FR2154459B1 (fr) 1971-09-28 1972-08-29

Country Status (4)

Country Link
JP (1) JPS4840699A (fr)
DE (1) DE2243153A1 (fr)
FR (1) FR2154459B1 (fr)
GB (1) GB1338370A (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031028B1 (fr) * 1968-08-15 1975-10-06
US3878085A (en) * 1973-07-05 1975-04-15 Sloan Technology Corp Cathode sputtering apparatus
DE3316548C2 (de) * 1983-03-25 1985-01-17 Flachglas AG, 8510 Fürth Verfahren zur Beschichtung eines transparenten Substrates
GB2182350B (en) * 1985-07-01 1989-04-26 Atomic Energy Authority Uk Coating improvements
EP0207768A3 (fr) * 1985-07-01 1987-08-05 United Kingdom Atomic Energy Authority Revêtement
GB2180262B (en) * 1985-09-05 1990-05-09 Plessey Co Plc Methods of forming substances on substrates by reactive sputtering
GB2181461B (en) * 1985-10-10 1989-09-27 Canadian Patents Dev Doping semiconductor compounds by reactive sputtering

Also Published As

Publication number Publication date
DE2243153A1 (de) 1973-04-05
JPS4840699A (fr) 1973-06-14
GB1338370A (en) 1973-11-21
FR2154459A1 (fr) 1973-05-11

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Legal Events

Date Code Title Description
ST Notification of lapse