FR2143224B1 - - Google Patents

Info

Publication number
FR2143224B1
FR2143224B1 FR7222420A FR7222420A FR2143224B1 FR 2143224 B1 FR2143224 B1 FR 2143224B1 FR 7222420 A FR7222420 A FR 7222420A FR 7222420 A FR7222420 A FR 7222420A FR 2143224 B1 FR2143224 B1 FR 2143224B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7222420A
Other languages
French (fr)
Other versions
FR2143224A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP46044731A external-priority patent/JPS5011284B1/ja
Priority claimed from JP46044991A external-priority patent/JPS5011285B1/ja
Priority claimed from JP7685771A external-priority patent/JPS5010725B2/ja
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Publication of FR2143224A1 publication Critical patent/FR2143224A1/fr
Application granted granted Critical
Publication of FR2143224B1 publication Critical patent/FR2143224B1/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08CTREATMENT OR CHEMICAL MODIFICATION OF RUBBERS
    • C08C19/00Chemical modification of rubber
    • C08C19/10Isomerisation; Cyclisation
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/008Azides
    • G03F7/012Macromolecular azides; Macromolecular additives, e.g. binders
    • G03F7/0125Macromolecular azides; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the macromolecular azides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
FR7222420A 1971-06-21 1972-06-21 Expired FR2143224B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP46044731A JPS5011284B1 (en) 1971-06-21 1971-06-21
JP46044991A JPS5011285B1 (en) 1971-06-22 1971-06-22
JP7685771A JPS5010725B2 (en) 1971-10-01 1971-10-01

Publications (2)

Publication Number Publication Date
FR2143224A1 FR2143224A1 (en) 1973-02-02
FR2143224B1 true FR2143224B1 (en) 1978-03-03

Family

ID=27292010

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7222420A Expired FR2143224B1 (en) 1971-06-21 1972-06-21

Country Status (6)

Country Link
CH (1) CH571730A5 (en)
DE (1) DE2230969C3 (en)
FR (1) FR2143224B1 (en)
GB (1) GB1392236A (en)
IT (1) IT958468B (en)
NL (1) NL169234C (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057584B2 (en) * 1979-04-24 1985-12-16 ジェイエスアール株式会社 photoresist composition

Also Published As

Publication number Publication date
NL169234C (en) 1982-06-16
DE2230969A1 (en) 1972-12-28
DE2230969B2 (en) 1975-02-13
NL7208520A (en) 1972-12-27
FR2143224A1 (en) 1973-02-02
IT958468B (en) 1973-10-20
NL169234B (en) 1982-01-18
DE2230969C3 (en) 1975-09-25
GB1392236A (en) 1975-04-30
CH571730A5 (en) 1976-01-15

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