FR2138013A1 - - Google Patents

Info

Publication number
FR2138013A1
FR2138013A1 FR7217602A FR7217602A FR2138013A1 FR 2138013 A1 FR2138013 A1 FR 2138013A1 FR 7217602 A FR7217602 A FR 7217602A FR 7217602 A FR7217602 A FR 7217602A FR 2138013 A1 FR2138013 A1 FR 2138013A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7217602A
Other languages
French (fr)
Other versions
FR2138013B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of FR2138013A1 publication Critical patent/FR2138013A1/fr
Application granted granted Critical
Publication of FR2138013B1 publication Critical patent/FR2138013B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR727217602A 1971-05-17 1972-05-17 Expired FR2138013B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14410671A 1971-05-17 1971-05-17

Publications (2)

Publication Number Publication Date
FR2138013A1 true FR2138013A1 (enrdf_load_stackoverflow) 1972-12-29
FR2138013B1 FR2138013B1 (enrdf_load_stackoverflow) 1973-07-13

Family

ID=22507062

Family Applications (1)

Application Number Title Priority Date Filing Date
FR727217602A Expired FR2138013B1 (enrdf_load_stackoverflow) 1971-05-17 1972-05-17

Country Status (5)

Country Link
US (1) US3787692A (enrdf_load_stackoverflow)
CA (1) CA961175A (enrdf_load_stackoverflow)
DE (1) DE2223086A1 (enrdf_load_stackoverflow)
FR (1) FR2138013B1 (enrdf_load_stackoverflow)
GB (1) GB1359926A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer
DE2743034C2 (de) * 1977-09-24 1982-06-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur Energiebestimmung von Elektronen
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
US5444242A (en) * 1992-09-29 1995-08-22 Physical Electronics Inc. Scanning and high resolution electron spectroscopy and imaging
DE10217513B4 (de) * 2002-04-19 2004-06-17 Gesellschaft zur Förderung der Spektrochemie und angewandten Spektroskopie e.V. Verfahren und Vorrichtung zur Analyse von verdeckten, oberflächennahen Schichten mittels Photoelektronen-Spektrometrie
US8774359B1 (en) * 2010-07-30 2014-07-08 Kla-Tencor Corporation Gate stack metrology

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3114832A (en) * 1960-07-28 1963-12-17 Radiation Counter Lab Inc X-ray spectroscopic system comprising plural sources, filters, fluorescent radiators, and comparative detectors
US3248543A (en) * 1963-04-18 1966-04-26 Arthur H Pitchford X-ray spectrographic apparatus having a pair of X-ray tubes with different emission properties
US3461306A (en) * 1967-04-27 1969-08-12 Gen Electric Electron probe microanalyzer for measuring the differential energy response of auger electrons
US3596091A (en) * 1969-05-19 1971-07-27 Varian Associates Induced electron emission spectrometer having a unipotential sample chamber

Also Published As

Publication number Publication date
DE2223086A1 (de) 1972-11-30
US3787692A (en) 1974-01-22
GB1359926A (en) 1974-07-17
FR2138013B1 (enrdf_load_stackoverflow) 1973-07-13
CA961175A (en) 1975-01-14

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Legal Events

Date Code Title Description
ST Notification of lapse