FR2128164B1 - - Google Patents

Info

Publication number
FR2128164B1
FR2128164B1 FR7108025A FR7108025A FR2128164B1 FR 2128164 B1 FR2128164 B1 FR 2128164B1 FR 7108025 A FR7108025 A FR 7108025A FR 7108025 A FR7108025 A FR 7108025A FR 2128164 B1 FR2128164 B1 FR 2128164B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7108025A
Other languages
French (fr)
Other versions
FR2128164A1 (https=
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7108025A priority Critical patent/FR2128164B1/fr
Priority to IT67729/72A priority patent/IT952930B/it
Priority to BE780423A priority patent/BE780423A/xx
Priority to GB1114772A priority patent/GB1380143A/en
Publication of FR2128164A1 publication Critical patent/FR2128164A1/fr
Application granted granted Critical
Publication of FR2128164B1 publication Critical patent/FR2128164B1/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/18Diffusion lifetime killers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
FR7108025A 1971-03-09 1971-03-09 Expired FR2128164B1 (https=)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7108025A FR2128164B1 (https=) 1971-03-09 1971-03-09
IT67729/72A IT952930B (it) 1971-03-09 1972-03-08 Procedimento per la fabbricazione di circuiti integrati al silicio
BE780423A BE780423A (fr) 1971-03-09 1972-03-09 Procede de fabrication de circuits integres au silicium
GB1114772A GB1380143A (https=) 1971-03-09 1972-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7108025A FR2128164B1 (https=) 1971-03-09 1971-03-09

Publications (2)

Publication Number Publication Date
FR2128164A1 FR2128164A1 (https=) 1972-10-20
FR2128164B1 true FR2128164B1 (https=) 1973-11-30

Family

ID=9073164

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7108025A Expired FR2128164B1 (https=) 1971-03-09 1971-03-09

Country Status (4)

Country Link
BE (1) BE780423A (https=)
FR (1) FR2128164B1 (https=)
GB (1) GB1380143A (https=)
IT (1) IT952930B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5262336A (en) * 1986-03-21 1993-11-16 Advanced Power Technology, Inc. IGBT process to produce platinum lifetime control
DE69421606T2 (de) * 1994-03-30 2000-05-31 Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno, Catania Verfahren zur Herstellung von bipolaren Transistoren mit kontrollierter Speicherzeit

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3590471A (en) * 1969-02-04 1971-07-06 Bell Telephone Labor Inc Fabrication of insulated gate field-effect transistors involving ion implantation

Also Published As

Publication number Publication date
GB1380143A (https=) 1975-01-08
IT952930B (it) 1973-07-30
BE780423A (fr) 1972-07-03
FR2128164A1 (https=) 1972-10-20

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Legal Events

Date Code Title Description
ST Notification of lapse