FR2125357A1 - - Google Patents
Info
- Publication number
- FR2125357A1 FR2125357A1 FR7204480A FR7204480A FR2125357A1 FR 2125357 A1 FR2125357 A1 FR 2125357A1 FR 7204480 A FR7204480 A FR 7204480A FR 7204480 A FR7204480 A FR 7204480A FR 2125357 A1 FR2125357 A1 FR 2125357A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
- H01J1/16—Cathodes heated directly by an electric current characterised by the shape
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Solid Thermionic Cathode (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7101954A NL7101954A (de) | 1971-02-13 | 1971-02-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2125357A1 true FR2125357A1 (de) | 1972-09-29 |
| FR2125357B1 FR2125357B1 (de) | 1975-02-14 |
Family
ID=19812480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7204480A Expired FR2125357B1 (de) | 1971-02-13 | 1972-02-10 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3755705A (de) |
| DE (1) | DE2165192A1 (de) |
| FR (1) | FR2125357B1 (de) |
| GB (1) | GB1377544A (de) |
| NL (1) | NL7101954A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2855864A1 (de) * | 1978-12-22 | 1980-07-10 | Ibm Deutschland | Ionenquelle, insbesondere fuer ionenimplantationsanlagen |
| EP0287774A3 (de) * | 1987-04-24 | 1990-03-07 | Balzers Aktiengesellschaft | Thermionische Haarnadelkathode |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1749780A (en) * | 1922-01-31 | 1930-03-11 | Westinghouse Lamp Co | Incandescent-cathode device |
| US3462635A (en) * | 1966-10-24 | 1969-08-19 | Ibm | Holder for highly reactive cathodes of rare-earth borides such as lanthanum hexaboride,the holder provided with a cooling means opposite to the emissive end of the cathode in order to reduce tendency of holder deterioration |
-
1971
- 1971-02-13 NL NL7101954A patent/NL7101954A/xx unknown
- 1971-12-29 DE DE19712165192 patent/DE2165192A1/de active Pending
-
1972
- 1972-01-31 US US00222149A patent/US3755705A/en not_active Expired - Lifetime
- 1972-02-10 GB GB626472A patent/GB1377544A/en not_active Expired
- 1972-02-10 FR FR7204480A patent/FR2125357B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7101954A (de) | 1972-08-15 |
| GB1377544A (en) | 1974-12-18 |
| DE2165192A1 (de) | 1972-08-31 |
| FR2125357B1 (de) | 1975-02-14 |
| US3755705A (en) | 1973-08-28 |