FR2124824A5 - - Google Patents
Info
- Publication number
- FR2124824A5 FR2124824A5 FR7202301A FR7202301A FR2124824A5 FR 2124824 A5 FR2124824 A5 FR 2124824A5 FR 7202301 A FR7202301 A FR 7202301A FR 7202301 A FR7202301 A FR 7202301A FR 2124824 A5 FR2124824 A5 FR 2124824A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/363—Direction discrimination
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10934571A | 1971-01-25 | 1971-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2124824A5 true FR2124824A5 (enExample) | 1972-09-22 |
Family
ID=22327171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7202301A Expired FR2124824A5 (enExample) | 1971-01-25 | 1972-01-25 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3713139A (enExample) |
| CA (1) | CA936964A (enExample) |
| DE (1) | DE2203418B2 (enExample) |
| FR (1) | FR2124824A5 (enExample) |
| GB (1) | GB1368204A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2476830A1 (fr) * | 1980-02-27 | 1981-08-28 | Heidenhain Gmbh Dr Johannes | Appareil numerique de mesure photo-electrique de longueur ou d'angle |
| WO1991003712A1 (en) * | 1989-09-06 | 1991-03-21 | Human Machine Interfaces Ltd. | Measurement device |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3973109A (en) * | 1975-03-17 | 1976-08-03 | Sanitary Scale Company | Null monitoring system |
| US4044847A (en) * | 1976-01-30 | 1977-08-30 | Pitney-Bowes, Inc. | Weighing system with a moire optoelectronic transducer |
| US4047585A (en) * | 1976-03-08 | 1977-09-13 | Pitney-Bowes, Inc. | Scale optical detector with spring constant variation compensator |
| US4101882A (en) * | 1976-05-28 | 1978-07-18 | The Brunton Company | Data read-out system and apparatus useful for angular measurements |
| DE2758525B1 (de) * | 1977-12-28 | 1979-06-28 | Heidenhain Gmbh Dr Johannes | Messeinrichtung mit codierter Unterteilung |
| US4229729A (en) * | 1978-05-19 | 1980-10-21 | Hughes Aircraft Company | Analog to digital converter utilizing a quantizer network |
| US4247214A (en) * | 1978-11-08 | 1981-01-27 | Ncr Corporation | Character position control for a matrix printer |
| EP0025724A1 (en) * | 1979-08-31 | 1981-03-25 | The Bendix Corporation | Method of making measurements on an object by means of a movable probe |
| CA1142345A (en) * | 1979-08-31 | 1983-03-08 | Gerald L. Tumbush | Relatively moving photodiode sensed diffraction grating-type measuring device |
| GB2126336B (en) * | 1982-08-26 | 1986-07-09 | British Aerospace | Detection of movement of a cyclic interference waveform such as in a ring laser gyroscope |
| US4464843A (en) * | 1982-11-26 | 1984-08-14 | The Brunton Company | Angular measurement apparatus with referencing system |
| DE3412128C1 (de) * | 1984-03-31 | 1985-05-09 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Positionsmesseinrichtung |
| JPS61198018A (ja) * | 1985-02-28 | 1986-09-02 | Nissan Motor Co Ltd | 位置検出装置 |
| DE3526735A1 (de) * | 1985-07-26 | 1987-02-05 | Heidenhain Gmbh Dr Johannes | Fehlergesicherte inkrementale positionsmesseinrichtung |
| JPS63247615A (ja) * | 1987-04-02 | 1988-10-14 | Matsushita Electric Ind Co Ltd | 位置検出方法及びその装置 |
| AT393029B (de) * | 1989-03-29 | 1991-07-25 | Rsf Elektronik Gmbh | Inkrementales laengenmesssystem |
| JPH02285705A (ja) * | 1989-04-26 | 1990-11-26 | Canon Inc | 信号内挿回路 |
| JP3082516B2 (ja) * | 1993-05-31 | 2000-08-28 | キヤノン株式会社 | 光学式変位センサおよび該光学式変位センサを用いた駆動システム |
| US7485847B2 (en) * | 2004-12-08 | 2009-02-03 | Georgia Tech Research Corporation | Displacement sensor employing discrete light pulse detection |
| CN100365390C (zh) * | 2005-10-14 | 2008-01-30 | 清华大学 | 用于开关式数字位移传感器的计数器式栅格带 |
| EA011543B1 (ru) * | 2007-04-11 | 2009-04-28 | Научно-Исследовательское И Проектно-Технологическое Республиканское Унитарное Предприятие "Институт Ниптис Им. Атаева С.С." | Способ измерения перемещения объекта |
| US12481224B2 (en) * | 2022-06-10 | 2025-11-25 | Nanya Technology Corporation | Method and system for overlay measurement |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3142121A (en) * | 1959-09-17 | 1964-07-28 | Elmic Inc | Micrometer |
| DE1208087B (de) * | 1964-04-22 | 1965-12-30 | Wenczler & Heidenhain | Einrichtung zum Messen von Laengen mittels Impulszaehlung |
| GB1058300A (en) * | 1964-06-23 | 1967-02-08 | Ferranti Ltd | Improvements relating to measuring apparatus |
| GB1137177A (en) * | 1966-11-23 | 1968-12-18 | Ashworth Ross & Company Ltd | Improvements relating to counting |
| US3588462A (en) * | 1966-12-23 | 1971-06-28 | Bausch & Lomb | Fringe interpolator and counter |
| US3549870A (en) * | 1967-04-07 | 1970-12-22 | Atomic Energy Commission | System for computing and continuously displaying increments of movement of an object in useable units of measure |
| US3571575A (en) * | 1967-06-28 | 1971-03-23 | Rank Organisation Ltd | Measurement devices |
-
1971
- 1971-01-25 US US00109345A patent/US3713139A/en not_active Expired - Lifetime
- 1971-11-17 CA CA127896A patent/CA936964A/en not_active Expired
-
1972
- 1972-01-25 FR FR7202301A patent/FR2124824A5/fr not_active Expired
- 1972-01-25 DE DE2203418A patent/DE2203418B2/de not_active Withdrawn
- 1972-01-25 GB GB354372A patent/GB1368204A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2476830A1 (fr) * | 1980-02-27 | 1981-08-28 | Heidenhain Gmbh Dr Johannes | Appareil numerique de mesure photo-electrique de longueur ou d'angle |
| WO1991003712A1 (en) * | 1989-09-06 | 1991-03-21 | Human Machine Interfaces Ltd. | Measurement device |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1368204A (en) | 1974-09-25 |
| CA936964A (en) | 1973-11-13 |
| DE2203418B2 (de) | 1979-04-05 |
| US3713139A (en) | 1973-01-23 |
| DE2203418A1 (de) | 1972-08-10 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |