CA936964A - Apparatus and method of determining displacements - Google Patents

Apparatus and method of determining displacements

Info

Publication number
CA936964A
CA936964A CA127896A CA127896A CA936964A CA 936964 A CA936964 A CA 936964A CA 127896 A CA127896 A CA 127896A CA 127896 A CA127896 A CA 127896A CA 936964 A CA936964 A CA 936964A
Authority
CA
Canada
Prior art keywords
determining displacements
displacements
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA127896A
Other languages
English (en)
Inventor
R. Sanford Norman
Vikmanis Juris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bendix Corp
Original Assignee
Bendix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bendix Corp filed Critical Bendix Corp
Application granted granted Critical
Publication of CA936964A publication Critical patent/CA936964A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/363—Direction discrimination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CA127896A 1971-01-25 1971-11-17 Apparatus and method of determining displacements Expired CA936964A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10934571A 1971-01-25 1971-01-25

Publications (1)

Publication Number Publication Date
CA936964A true CA936964A (en) 1973-11-13

Family

ID=22327171

Family Applications (1)

Application Number Title Priority Date Filing Date
CA127896A Expired CA936964A (en) 1971-01-25 1971-11-17 Apparatus and method of determining displacements

Country Status (5)

Country Link
US (1) US3713139A (enExample)
CA (1) CA936964A (enExample)
DE (1) DE2203418B2 (enExample)
FR (1) FR2124824A5 (enExample)
GB (1) GB1368204A (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3973109A (en) * 1975-03-17 1976-08-03 Sanitary Scale Company Null monitoring system
US4044847A (en) * 1976-01-30 1977-08-30 Pitney-Bowes, Inc. Weighing system with a moire optoelectronic transducer
US4047585A (en) * 1976-03-08 1977-09-13 Pitney-Bowes, Inc. Scale optical detector with spring constant variation compensator
US4101882A (en) * 1976-05-28 1978-07-18 The Brunton Company Data read-out system and apparatus useful for angular measurements
DE2758525B1 (de) * 1977-12-28 1979-06-28 Heidenhain Gmbh Dr Johannes Messeinrichtung mit codierter Unterteilung
US4229729A (en) * 1978-05-19 1980-10-21 Hughes Aircraft Company Analog to digital converter utilizing a quantizer network
US4247214A (en) * 1978-11-08 1981-01-27 Ncr Corporation Character position control for a matrix printer
EP0025724A1 (en) * 1979-08-31 1981-03-25 The Bendix Corporation Method of making measurements on an object by means of a movable probe
CA1142345A (en) * 1979-08-31 1983-03-08 Gerald L. Tumbush Relatively moving photodiode sensed diffraction grating-type measuring device
DE3007311C2 (de) * 1980-02-27 1985-11-28 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Digitales lichtelektrisches Längen- oder Winkelmeßsystem
GB2126336B (en) * 1982-08-26 1986-07-09 British Aerospace Detection of movement of a cyclic interference waveform such as in a ring laser gyroscope
US4464843A (en) * 1982-11-26 1984-08-14 The Brunton Company Angular measurement apparatus with referencing system
DE3412128C1 (de) * 1984-03-31 1985-05-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmesseinrichtung
JPS61198018A (ja) * 1985-02-28 1986-09-02 Nissan Motor Co Ltd 位置検出装置
DE3526735A1 (de) * 1985-07-26 1987-02-05 Heidenhain Gmbh Dr Johannes Fehlergesicherte inkrementale positionsmesseinrichtung
JPS63247615A (ja) * 1987-04-02 1988-10-14 Matsushita Electric Ind Co Ltd 位置検出方法及びその装置
AT393029B (de) * 1989-03-29 1991-07-25 Rsf Elektronik Gmbh Inkrementales laengenmesssystem
JPH02285705A (ja) * 1989-04-26 1990-11-26 Canon Inc 信号内挿回路
WO1991003712A1 (en) * 1989-09-06 1991-03-21 Human Machine Interfaces Ltd. Measurement device
JP3082516B2 (ja) * 1993-05-31 2000-08-28 キヤノン株式会社 光学式変位センサおよび該光学式変位センサを用いた駆動システム
US7485847B2 (en) * 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
CN100365390C (zh) * 2005-10-14 2008-01-30 清华大学 用于开关式数字位移传感器的计数器式栅格带
EA011543B1 (ru) * 2007-04-11 2009-04-28 Научно-Исследовательское И Проектно-Технологическое Республиканское Унитарное Предприятие "Институт Ниптис Им. Атаева С.С." Способ измерения перемещения объекта
US12481224B2 (en) * 2022-06-10 2025-11-25 Nanya Technology Corporation Method and system for overlay measurement

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3142121A (en) * 1959-09-17 1964-07-28 Elmic Inc Micrometer
DE1208087B (de) * 1964-04-22 1965-12-30 Wenczler & Heidenhain Einrichtung zum Messen von Laengen mittels Impulszaehlung
GB1058300A (en) * 1964-06-23 1967-02-08 Ferranti Ltd Improvements relating to measuring apparatus
GB1137177A (en) * 1966-11-23 1968-12-18 Ashworth Ross & Company Ltd Improvements relating to counting
US3588462A (en) * 1966-12-23 1971-06-28 Bausch & Lomb Fringe interpolator and counter
US3549870A (en) * 1967-04-07 1970-12-22 Atomic Energy Commission System for computing and continuously displaying increments of movement of an object in useable units of measure
US3571575A (en) * 1967-06-28 1971-03-23 Rank Organisation Ltd Measurement devices

Also Published As

Publication number Publication date
GB1368204A (en) 1974-09-25
DE2203418B2 (de) 1979-04-05
US3713139A (en) 1973-01-23
FR2124824A5 (enExample) 1972-09-22
DE2203418A1 (de) 1972-08-10

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