FR2117066A5 - - Google Patents

Info

Publication number
FR2117066A5
FR2117066A5 FR7138334A FR7138334A FR2117066A5 FR 2117066 A5 FR2117066 A5 FR 2117066A5 FR 7138334 A FR7138334 A FR 7138334A FR 7138334 A FR7138334 A FR 7138334A FR 2117066 A5 FR2117066 A5 FR 2117066A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7138334A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2117066A5 publication Critical patent/FR2117066A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D5/00—Control of dimensions of material
    • G05D5/02—Control of dimensions of material of thickness, e.g. of rolled material
    • G05D5/03—Control of dimensions of material of thickness, e.g. of rolled material characterised by the use of electric means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Physical Vapour Deposition (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
FR7138334A 1970-12-09 1971-10-19 Expired FR2117066A5 (show.php)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US9637770A 1970-12-09 1970-12-09

Publications (1)

Publication Number Publication Date
FR2117066A5 true FR2117066A5 (show.php) 1972-07-21

Family

ID=22257080

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7138334A Expired FR2117066A5 (show.php) 1970-12-09 1971-10-19

Country Status (4)

Country Link
US (1) US3689747A (show.php)
DE (1) DE2153231A1 (show.php)
FR (1) FR2117066A5 (show.php)
GB (1) GB1314305A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396093A1 (fr) * 1977-07-01 1979-01-26 Hitachi Ltd Appareil pour le depot en phase de vapeurs sous vide

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3830090A (en) * 1972-07-27 1974-08-20 Gull Airborne Instruments Inc Electrical measuring apparatus employing analog condition responsive means to operate remote digital indicators
DE2257578A1 (de) * 1972-11-24 1974-06-06 Wandel & Goltermann Frequenzzaehler
HU170602B (show.php) * 1975-05-05 1977-07-28
CA1087712A (en) * 1976-11-01 1980-10-14 Northern Telecom Limited Control for wire coating line
US4215308A (en) * 1978-10-30 1980-07-29 Hewlett-Packard Company Self calibrating crystal controlled frequency counter method and apparatus
EP0038637A1 (en) * 1980-04-18 1981-10-28 Secretary of State for Social Services in Her Britannic Majesty's Gov. of the U.K. of Great Britain and Northern Ireland Improvements in or relating to a method and apparatus for detecting the presence of contaminants in a gaseous carrier
DE3315666A1 (de) * 1983-04-29 1984-10-31 Siemens AG, 1000 Berlin und 8000 München Verfahren zur messung des auftrages und abtrages von duennen schichten
WO1986007156A1 (en) * 1985-05-28 1986-12-04 Emkay Manufacturing Company High speed digital frequency counter
DE3700366A1 (de) * 1987-01-08 1988-07-21 Leybold Ag Einrichtung zum ermitteln der jeweiligen dicke von sich veraendernden material-schichten auf einem substrat waehrend des beschichtungsvorgangs
EP0284678B1 (en) * 1987-03-31 1992-06-03 Benjamin Gavish A device and method for monitoring small displacements of a peak in a frequency spectrum
US5117192A (en) * 1990-01-12 1992-05-26 Leybold Inficon Inc. Control circuitry for quartz crystal deposition monitor
US5112642A (en) * 1990-03-30 1992-05-12 Leybold Inficon, Inc. Measuring and controlling deposition on a piezoelectric monitor crystal
JP2633106B2 (ja) * 1991-05-24 1997-07-23 シャープ株式会社 レジスト塗布装置
US6558735B2 (en) * 2001-04-20 2003-05-06 Eastman Kodak Company Reusable mass-sensor in manufacture of organic light-emitting devices
JP2012114157A (ja) * 2010-11-22 2012-06-14 Toshiba Corp ドロップレシピ作成方法およびデータベース作成方法
US9182378B2 (en) * 2013-03-15 2015-11-10 Inficon, Inc. High capacity monitor crystal exchanger utilizing an organized 3-D storage structure
US11215586B2 (en) * 2017-01-30 2022-01-04 Aromatix, Inc. Ultrasound gas sensor system using machine learning
CN106967959A (zh) * 2017-05-15 2017-07-21 成都西沃克真空科技有限公司 一种晶振探头用控制系统

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH387752A (de) * 1960-07-21 1965-02-15 Ibm Verfahren und Einrichtung zur Regelung einer durch elektrische Schwingungen veränderliche Frequenz dargestellten Grösse eines Vorganges

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396093A1 (fr) * 1977-07-01 1979-01-26 Hitachi Ltd Appareil pour le depot en phase de vapeurs sous vide

Also Published As

Publication number Publication date
US3689747A (en) 1972-09-05
GB1314305A (en) 1973-04-18
DE2153231A1 (de) 1972-06-22

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Legal Events

Date Code Title Description
ST Notification of lapse