FR2105407A5 - Indirectly heated cathode - for a source of high energy ions - Google Patents

Indirectly heated cathode - for a source of high energy ions

Info

Publication number
FR2105407A5
FR2105407A5 FR7032307A FR7032307A FR2105407A5 FR 2105407 A5 FR2105407 A5 FR 2105407A5 FR 7032307 A FR7032307 A FR 7032307A FR 7032307 A FR7032307 A FR 7032307A FR 2105407 A5 FR2105407 A5 FR 2105407A5
Authority
FR
France
Prior art keywords
source
high energy
indirectly heated
energy ions
heated cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7032307A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7032307A priority Critical patent/FR2105407A5/en
Application granted granted Critical
Publication of FR2105407A5 publication Critical patent/FR2105407A5/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The emitter is heated by a spiral coil of W or Ta which surrounds it and is joined to a cylinder in which it is enclosed. The emitter is aligned along the axis of the cylinder. The emitter may be in the form of a trellis work roller, a W rod with a crystal with high electronic emissivity or W wire which emits electrons from its end and is replenished from a coil as the end evaporates.
FR7032307A 1970-09-04 1970-09-04 Indirectly heated cathode - for a source of high energy ions Expired FR2105407A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7032307A FR2105407A5 (en) 1970-09-04 1970-09-04 Indirectly heated cathode - for a source of high energy ions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7032307A FR2105407A5 (en) 1970-09-04 1970-09-04 Indirectly heated cathode - for a source of high energy ions

Publications (1)

Publication Number Publication Date
FR2105407A5 true FR2105407A5 (en) 1972-04-28

Family

ID=9060928

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7032307A Expired FR2105407A5 (en) 1970-09-04 1970-09-04 Indirectly heated cathode - for a source of high energy ions

Country Status (1)

Country Link
FR (1) FR2105407A5 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0106589A3 (en) * 1982-09-29 1986-01-15 Tetra Laval Holdings & Finance SA Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
WO2001088946A1 (en) * 2000-05-17 2001-11-22 Varian Semiconductor Equipment Associates, Inc. Cathode assembly for indirectly heated cathode ion source
US6777686B2 (en) 2000-05-17 2004-08-17 Varian Semiconductor Equipment Associates, Inc. Control system for indirectly heated cathode ion source
US7138768B2 (en) 2002-05-23 2006-11-21 Varian Semiconductor Equipment Associates, Inc. Indirectly heated cathode ion source

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0106589A3 (en) * 1982-09-29 1986-01-15 Tetra Laval Holdings & Finance SA Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
WO2001088946A1 (en) * 2000-05-17 2001-11-22 Varian Semiconductor Equipment Associates, Inc. Cathode assembly for indirectly heated cathode ion source
US6777686B2 (en) 2000-05-17 2004-08-17 Varian Semiconductor Equipment Associates, Inc. Control system for indirectly heated cathode ion source
US7276847B2 (en) 2000-05-17 2007-10-02 Varian Semiconductor Equipment Associates, Inc. Cathode assembly for indirectly heated cathode ion source
US7138768B2 (en) 2002-05-23 2006-11-21 Varian Semiconductor Equipment Associates, Inc. Indirectly heated cathode ion source

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Legal Events

Date Code Title Description
ST Notification of lapse