FR2093930B1 - - Google Patents
Info
- Publication number
- FR2093930B1 FR2093930B1 FR717115061A FR7115061A FR2093930B1 FR 2093930 B1 FR2093930 B1 FR 2093930B1 FR 717115061 A FR717115061 A FR 717115061A FR 7115061 A FR7115061 A FR 7115061A FR 2093930 B1 FR2093930 B1 FR 2093930B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4234470A | 1970-06-01 | 1970-06-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2093930A1 FR2093930A1 (en:Method) | 1972-02-04 |
| FR2093930B1 true FR2093930B1 (en:Method) | 1974-06-21 |
Family
ID=21921370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR717115061A Expired FR2093930B1 (en:Method) | 1970-06-01 | 1971-04-20 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3701659A (en:Method) |
| FR (1) | FR2093930B1 (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6076652A (en) | 1971-04-16 | 2000-06-20 | Texas Instruments Incorporated | Assembly line system and apparatus controlling transfer of a workpiece |
| JPS5532250A (en) * | 1978-08-25 | 1980-03-06 | Matsushita Electric Ind Co Ltd | Duplicating method for fine pattern |
| JPS5857706A (ja) * | 1981-10-02 | 1983-04-06 | Shin Etsu Chem Co Ltd | 磁気バブルメモリ−バイアス磁界用永久磁石 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1031978A (en) * | 1964-11-06 | 1966-06-02 | Standard Telephones Cables Ltd | Improvements in or relating to photolithographic masks |
-
1970
- 1970-06-01 US US42344A patent/US3701659A/en not_active Expired - Lifetime
-
1971
- 1971-04-20 FR FR717115061A patent/FR2093930B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2093930A1 (en:Method) | 1972-02-04 |
| US3701659A (en) | 1972-10-31 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |