FR2092249A5 - - Google Patents

Info

Publication number
FR2092249A5
FR2092249A5 FR7037304A FR7037304A FR2092249A5 FR 2092249 A5 FR2092249 A5 FR 2092249A5 FR 7037304 A FR7037304 A FR 7037304A FR 7037304 A FR7037304 A FR 7037304A FR 2092249 A5 FR2092249 A5 FR 2092249A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7037304A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2092249A5 publication Critical patent/FR2092249A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
FR7037304A 1970-04-06 1970-10-15 Expired FR2092249A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702016339 DE2016339C3 (de) 1970-04-06 1970-04-06 Verfahren zum Herstellen eines Hohlkörpers aus Halbleitermaterial

Publications (1)

Publication Number Publication Date
FR2092249A5 true FR2092249A5 (fr) 1971-01-21

Family

ID=5767232

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7037304A Expired FR2092249A5 (fr) 1970-04-06 1970-10-15

Country Status (10)

Country Link
JP (1) JPS5121937B1 (fr)
AT (1) AT338874B (fr)
CA (1) CA942639A (fr)
CH (1) CH537985A (fr)
CS (1) CS172916B2 (fr)
DE (1) DE2016339C3 (fr)
FR (1) FR2092249A5 (fr)
GB (1) GB1320416A (fr)
NL (1) NL7014606A (fr)
SE (1) SE354975B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331407A (en) * 1976-09-02 1978-03-24 Canon Kk Printer
US4491604A (en) * 1982-12-27 1985-01-01 Lesk Israel A Silicon deposition process
CN111647943A (zh) 2012-06-29 2020-09-11 三菱综合材料株式会社 多晶硅棒

Also Published As

Publication number Publication date
GB1320416A (en) 1973-06-13
JPS5121937B1 (fr) 1976-07-06
NL7014606A (fr) 1971-10-08
AT338874B (de) 1977-09-26
DE2016339A1 (de) 1971-10-21
CH537985A (de) 1973-06-15
CS172916B2 (fr) 1977-01-28
DE2016339B2 (de) 1979-04-19
ATA869470A (de) 1977-01-15
DE2016339C3 (de) 1979-12-13
CA942639A (en) 1974-02-26
SE354975B (fr) 1973-04-02

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Legal Events

Date Code Title Description
ST Notification of lapse