FR2088469A1 - - Google Patents

Info

Publication number
FR2088469A1
FR2088469A1 FR7113726A FR7113726A FR2088469A1 FR 2088469 A1 FR2088469 A1 FR 2088469A1 FR 7113726 A FR7113726 A FR 7113726A FR 7113726 A FR7113726 A FR 7113726A FR 2088469 A1 FR2088469 A1 FR 2088469A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7113726A
Other languages
French (fr)
Other versions
FR2088469B1 (OSRAM
Inventor
K H Johannsmeier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2088469A1 publication Critical patent/FR2088469A1/fr
Application granted granted Critical
Publication of FR2088469B1 publication Critical patent/FR2088469B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • H10P72/57—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
FR7113726A 1970-05-11 1971-04-19 Expired FR2088469B1 (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US3617470A 1970-05-11 1970-05-11

Publications (2)

Publication Number Publication Date
FR2088469A1 true FR2088469A1 (OSRAM) 1972-01-07
FR2088469B1 FR2088469B1 (OSRAM) 1974-04-12

Family

ID=21887058

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7113726A Expired FR2088469B1 (OSRAM) 1970-05-11 1971-04-19

Country Status (6)

Country Link
US (1) US3674368A (OSRAM)
JP (1) JPS5328748B1 (OSRAM)
CA (1) CA920797A (OSRAM)
FR (1) FR2088469B1 (OSRAM)
GB (1) GB1324810A (OSRAM)
HK (1) HK69676A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2478937A1 (fr) * 1980-03-21 1981-09-25 Cit Alcatel Dispositif de mise en place de plaquettes portant des circuits electroniques sous un appareil de traitement ou de controle
EP0258794A3 (en) * 1986-09-05 1990-01-24 Svg Lithography Systems, Inc. Air gauge diffuser

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435653Y2 (OSRAM) * 1971-11-08 1979-10-29
US3858978A (en) * 1973-08-10 1975-01-07 Kasper Instruments Chuck for use in out-of-contact optical alignment and exposure apparatus
US4093378A (en) * 1976-11-01 1978-06-06 International Business Machines Corporation Alignment apparatus
US4141640A (en) * 1977-01-26 1979-02-27 Addressograph-Multigraph Corporation Method and apparatus for developing microfilm
FR2429447A1 (fr) * 1978-06-23 1980-01-18 Thomson Csf Systeme optique de projection muni d'un positionneur de plaque
USRE30601E (en) * 1978-12-11 1981-05-05 International Business Machines Corporation Alignment apparatus
EP0103188B1 (en) * 1979-10-11 1986-12-03 Eaton-Optimetrix Inc. Improved shock and vibration isolation system
US4336917A (en) 1979-10-11 1982-06-29 Optimetrix Corporation Shock and vibration isolation system
US4278348A (en) * 1979-11-26 1981-07-14 Quintel Corporation Locking mechanism for use in a chuck for an optical alignment and exposure apparatus
JP6683575B2 (ja) * 2016-09-01 2020-04-22 東京エレクトロン株式会社 プラズマ処理装置
NL2017773B1 (en) * 2016-11-11 2018-05-24 Suss Microtec Lithography Gmbh Positioning device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2042416A1 (OSRAM) * 1969-05-05 1971-02-12 Elektromat Veb

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2042416A1 (OSRAM) * 1969-05-05 1971-02-12 Elektromat Veb

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2478937A1 (fr) * 1980-03-21 1981-09-25 Cit Alcatel Dispositif de mise en place de plaquettes portant des circuits electroniques sous un appareil de traitement ou de controle
EP0258794A3 (en) * 1986-09-05 1990-01-24 Svg Lithography Systems, Inc. Air gauge diffuser

Also Published As

Publication number Publication date
CA920797A (en) 1973-02-13
FR2088469B1 (OSRAM) 1974-04-12
US3674368A (en) 1972-07-04
GB1324810A (en) 1973-07-25
JPS5328748B1 (OSRAM) 1978-08-16
DE2046686B2 (de) 1975-08-21
HK69676A (en) 1976-11-12
DE2046686A1 (de) 1971-11-18

Similar Documents

Publication Publication Date Title
FR2088469B1 (OSRAM)
AU1146470A (OSRAM)
AU1473870A (OSRAM)
AU2085370A (OSRAM)
AU2130570A (OSRAM)
AU1833270A (OSRAM)
AU1326870A (OSRAM)
AU1336970A (OSRAM)
AU1517670A (OSRAM)
AU1716970A (OSRAM)
AU1247570A (OSRAM)
AU1841070A (OSRAM)
AU2131570A (OSRAM)
AU2115870A (OSRAM)
AU1603270A (OSRAM)
AU2119370A (OSRAM)
AU1083170A (OSRAM)
AU1086670A (OSRAM)
AU1591370A (OSRAM)
AU1581370A (OSRAM)
AU1689770A (OSRAM)
AU1277070A (OSRAM)
AU1789870A (OSRAM)
AU2130770A (OSRAM)
AU1189670A (OSRAM)

Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse