CA920797A - Out of contact optical alignment and exposure apparatus - Google Patents

Out of contact optical alignment and exposure apparatus

Info

Publication number
CA920797A
CA920797A CA100175A CA100175A CA920797A CA 920797 A CA920797 A CA 920797A CA 100175 A CA100175 A CA 100175A CA 100175 A CA100175 A CA 100175A CA 920797 A CA920797 A CA 920797A
Authority
CA
Canada
Prior art keywords
exposure apparatus
optical alignment
contact optical
contact
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA100175A
Other languages
English (en)
Other versions
CA100175S (en
Inventor
Johannsmeier Karl-Heinz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of CA920797A publication Critical patent/CA920797A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • H10P72/57—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA100175A 1970-05-11 1970-12-09 Out of contact optical alignment and exposure apparatus Expired CA920797A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US3617470A 1970-05-11 1970-05-11

Publications (1)

Publication Number Publication Date
CA920797A true CA920797A (en) 1973-02-13

Family

ID=21887058

Family Applications (1)

Application Number Title Priority Date Filing Date
CA100175A Expired CA920797A (en) 1970-05-11 1970-12-09 Out of contact optical alignment and exposure apparatus

Country Status (6)

Country Link
US (1) US3674368A (OSRAM)
JP (1) JPS5328748B1 (OSRAM)
CA (1) CA920797A (OSRAM)
FR (1) FR2088469B1 (OSRAM)
GB (1) GB1324810A (OSRAM)
HK (1) HK69676A (OSRAM)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435653Y2 (OSRAM) * 1971-11-08 1979-10-29
US3858978A (en) * 1973-08-10 1975-01-07 Kasper Instruments Chuck for use in out-of-contact optical alignment and exposure apparatus
US4093378A (en) * 1976-11-01 1978-06-06 International Business Machines Corporation Alignment apparatus
US4141640A (en) * 1977-01-26 1979-02-27 Addressograph-Multigraph Corporation Method and apparatus for developing microfilm
FR2429447A1 (fr) * 1978-06-23 1980-01-18 Thomson Csf Systeme optique de projection muni d'un positionneur de plaque
USRE30601E (en) * 1978-12-11 1981-05-05 International Business Machines Corporation Alignment apparatus
EP0103188B1 (en) * 1979-10-11 1986-12-03 Eaton-Optimetrix Inc. Improved shock and vibration isolation system
US4336917A (en) 1979-10-11 1982-06-29 Optimetrix Corporation Shock and vibration isolation system
US4278348A (en) * 1979-11-26 1981-07-14 Quintel Corporation Locking mechanism for use in a chuck for an optical alignment and exposure apparatus
FR2478937A1 (fr) * 1980-03-21 1981-09-25 Cit Alcatel Dispositif de mise en place de plaquettes portant des circuits electroniques sous un appareil de traitement ou de controle
EP0258794A3 (en) * 1986-09-05 1990-01-24 Svg Lithography Systems, Inc. Air gauge diffuser
JP6683575B2 (ja) * 2016-09-01 2020-04-22 東京エレクトロン株式会社 プラズマ処理装置
NL2017773B1 (en) * 2016-11-11 2018-05-24 Suss Microtec Lithography Gmbh Positioning device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD80779A1 (OSRAM) * 1969-05-05 1971-03-20

Also Published As

Publication number Publication date
FR2088469B1 (OSRAM) 1974-04-12
US3674368A (en) 1972-07-04
GB1324810A (en) 1973-07-25
JPS5328748B1 (OSRAM) 1978-08-16
FR2088469A1 (OSRAM) 1972-01-07
DE2046686B2 (de) 1975-08-21
HK69676A (en) 1976-11-12
DE2046686A1 (de) 1971-11-18

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