FR2081021B1 - - Google Patents

Info

Publication number
FR2081021B1
FR2081021B1 FR717103659A FR7103659A FR2081021B1 FR 2081021 B1 FR2081021 B1 FR 2081021B1 FR 717103659 A FR717103659 A FR 717103659A FR 7103659 A FR7103659 A FR 7103659A FR 2081021 B1 FR2081021 B1 FR 2081021B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR717103659A
Other languages
French (fr)
Other versions
FR2081021A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2081021A1 publication Critical patent/FR2081021A1/fr
Application granted granted Critical
Publication of FR2081021B1 publication Critical patent/FR2081021B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H01L21/2251—Diffusion into or out of group IV semiconductors
    • H01L21/2252—Diffusion into or out of group IV semiconductors using predeposition of impurities into the semiconductor surface, e.g. from a gaseous phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
FR717103659A 1970-02-20 1971-01-27 Expired FR2081021B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1297770A 1970-02-20 1970-02-20

Publications (2)

Publication Number Publication Date
FR2081021A1 FR2081021A1 (en) 1971-11-26
FR2081021B1 true FR2081021B1 (en) 1974-03-01

Family

ID=21757664

Family Applications (1)

Application Number Title Priority Date Filing Date
FR717103659A Expired FR2081021B1 (en) 1970-02-20 1971-01-27

Country Status (4)

Country Link
US (1) US3676231A (en)
JP (1) JPS4840805B1 (en)
DE (1) DE2107991A1 (en)
FR (1) FR2081021B1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3959040A (en) * 1971-09-01 1976-05-25 Motorola, Inc. Compound diffused regions for emitter-coupled logic circuits
US4129090A (en) * 1973-02-28 1978-12-12 Hitachi, Ltd. Apparatus for diffusion into semiconductor wafers
US3966515A (en) * 1974-05-17 1976-06-29 Teledyne, Inc. Method for manufacturing high voltage field-effect transistors
DE2838928A1 (en) * 1978-09-07 1980-03-20 Ibm Deutschland METHOD FOR DOPING SILICON BODIES WITH BOR
US4234361A (en) * 1979-07-05 1980-11-18 Wisconsin Alumni Research Foundation Process for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layer
US5494852A (en) * 1993-07-28 1996-02-27 Sony Electronics Inc. High capacity semiconductor dopant deposition/oxidization process using a single furnace cycle
DE19840866B4 (en) * 1998-08-31 2005-02-03 IHP GmbH - Innovations for High Performance Microelectronics/Institut für innovative Mikroelektronik A method of doping the external base pads of Si-based single-polysilicon npn bipolar transistors
DE102012025429A1 (en) * 2012-12-21 2014-06-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for doping semiconductor substrates and doped semiconductor substrate

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1115140A (en) * 1966-12-30 1968-05-29 Standard Telephones Cables Ltd Semiconductors
US3542609A (en) * 1967-11-22 1970-11-24 Itt Double depositions of bbr3 in silicon

Also Published As

Publication number Publication date
DE2107991A1 (en) 1971-08-26
JPS4840805B1 (en) 1973-12-03
FR2081021A1 (en) 1971-11-26
US3676231A (en) 1972-07-11

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Legal Events

Date Code Title Description
ST Notification of lapse