Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
  • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
  • H01L21/2251—Diffusion into or out of group IV semiconductors
  • H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
  • H01L21/2255—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer comprising oxides only, e.g. P2O5, PSG, H3BO3, doped oxides

Landscapes

• Engineering & Computer Science (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Physics & Mathematics (AREA)
• Power Engineering (AREA)
• Crystals, And After-Treatments Of Crystals (AREA)
• Photovoltaic Devices (AREA)
• Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
• Formation Of Insulating Films (AREA)
• Silicon Compounds (AREA)

Applications Claiming Priority (1)

Publications (2)

Family

ID=5762769

Family Applications (1)

Country Status (8)

Cited By (1)

Families Citing this family (3)

Citations (4)

• 1970
  • 1970-02-19 DE DE19702007752 patent/DE2007752B2/de active Granted
• 1971
  • 1971-02-01 AT AT82571A patent/AT338335B/de not_active IP Right Cessation
  • 1971-02-03 CH CH158671A patent/CH519249A/de not_active IP Right Cessation
  • 1971-02-16 FR FR7105142A patent/FR2080610B1/fr not_active Expired
  • 1971-02-18 NL NL7102176A patent/NL7102176A/xx unknown
  • 1971-02-19 SE SE216671A patent/SE366227B/xx unknown
  • 1971-02-19 JP JP790471A patent/JPS5338597B1/ja active Pending
  • 1971-04-19 GB GB1289432D patent/GB1289432A/en not_active Expired

Patent Citations (4)

Also Published As

Similar Documents

Legal Events