FR2080511A1 - - Google Patents

Info

Publication number
FR2080511A1
FR2080511A1 FR7001863A FR7001863A FR2080511A1 FR 2080511 A1 FR2080511 A1 FR 2080511A1 FR 7001863 A FR7001863 A FR 7001863A FR 7001863 A FR7001863 A FR 7001863A FR 2080511 A1 FR2080511 A1 FR 2080511A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7001863A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7001863A priority Critical patent/FR2080511A1/fr
Priority to GB251971A priority patent/GB1321172A/en
Priority to NL7100749A priority patent/NL7100749A/xx
Priority to DE19712102592 priority patent/DE2102592A1/de
Publication of FR2080511A1 publication Critical patent/FR2080511A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7001863A 1970-01-20 1970-01-20 Withdrawn FR2080511A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7001863A FR2080511A1 (ja) 1970-01-20 1970-01-20
GB251971A GB1321172A (en) 1970-01-20 1971-01-19 Method and device for obtaining parallel and focused ionic microbeams and application of said method to the collective formation of electric circuits by ion implantation
NL7100749A NL7100749A (ja) 1970-01-20 1971-01-20
DE19712102592 DE2102592A1 (de) 1970-01-20 1971-01-20 Verfahren und Vorrichtung zum Erzeu gen von parallelen Mikroionenstrahlen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7001863A FR2080511A1 (ja) 1970-01-20 1970-01-20

Publications (1)

Publication Number Publication Date
FR2080511A1 true FR2080511A1 (ja) 1971-11-19

Family

ID=9049291

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7001863A Withdrawn FR2080511A1 (ja) 1970-01-20 1970-01-20

Country Status (4)

Country Link
DE (1) DE2102592A1 (ja)
FR (1) FR2080511A1 (ja)
GB (1) GB1321172A (ja)
NL (1) NL7100749A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2193300A1 (ja) * 1972-07-13 1974-02-15 Texas Instruments Inc
FR2385222A1 (fr) * 1977-03-23 1978-10-20 Western Electric Co Procede et dispositif d'exposition par faisceau d'electrons

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138744A1 (de) * 1981-09-29 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleitervorrichtungen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2193300A1 (ja) * 1972-07-13 1974-02-15 Texas Instruments Inc
FR2385222A1 (fr) * 1977-03-23 1978-10-20 Western Electric Co Procede et dispositif d'exposition par faisceau d'electrons

Also Published As

Publication number Publication date
DE2102592A1 (de) 1971-07-29
GB1321172A (en) 1973-06-20
NL7100749A (ja) 1971-07-22

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Legal Events

Date Code Title Description
ST Notification of lapse