FR2076567A5 - - Google Patents

Info

Publication number
FR2076567A5
FR2076567A5 FR7001862A FR7001862A FR2076567A5 FR 2076567 A5 FR2076567 A5 FR 2076567A5 FR 7001862 A FR7001862 A FR 7001862A FR 7001862 A FR7001862 A FR 7001862A FR 2076567 A5 FR2076567 A5 FR 2076567A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7001862A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7001862A priority Critical patent/FR2076567A5/fr
Priority to US00107720A priority patent/US3717785A/en
Priority to GB251771A priority patent/GB1305523A/en
Priority to FR7101748A priority patent/FR2122684A6/fr
Priority to DE19712102608 priority patent/DE2102608A1/de
Priority to NL7100748A priority patent/NL7100748A/xx
Application granted granted Critical
Publication of FR2076567A5 publication Critical patent/FR2076567A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/80—Arrangements for controlling the ray or beam after passing the main deflection system, e.g. for post-acceleration or post-concentration, for colour switching
    • H01J29/803—Arrangements for controlling the ray or beam after passing the main deflection system, e.g. for post-acceleration or post-concentration, for colour switching for post-acceleration or post-deflection, e.g. for colour switching
    • H01J29/806—Electron lens mosaics, e.g. fly's eye lenses, colour selection lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Tubes For Measurement (AREA)
FR7001862A 1970-01-20 1970-01-20 Expired FR2076567A5 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7001862A FR2076567A5 (de) 1970-01-20 1970-01-20
US00107720A US3717785A (en) 1970-01-20 1971-01-19 System of electrostatic quadrupole micro-lenses
GB251771A GB1305523A (de) 1970-01-20 1971-01-19
FR7101748A FR2122684A6 (de) 1970-01-20 1971-01-20
DE19712102608 DE2102608A1 (de) 1970-01-20 1971-01-20 Elektrostatisches Mikrohnsenraster
NL7100748A NL7100748A (de) 1970-01-20 1971-01-20

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7001862A FR2076567A5 (de) 1970-01-20 1970-01-20
FR7101748A FR2122684A6 (de) 1970-01-20 1971-01-20

Publications (1)

Publication Number Publication Date
FR2076567A5 true FR2076567A5 (de) 1971-10-15

Family

ID=26215496

Family Applications (2)

Application Number Title Priority Date Filing Date
FR7001862A Expired FR2076567A5 (de) 1970-01-20 1970-01-20
FR7101748A Expired FR2122684A6 (de) 1970-01-20 1971-01-20

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR7101748A Expired FR2122684A6 (de) 1970-01-20 1971-01-20

Country Status (5)

Country Link
US (1) US3717785A (de)
DE (1) DE2102608A1 (de)
FR (2) FR2076567A5 (de)
GB (1) GB1305523A (de)
NL (1) NL7100748A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0069728A1 (de) * 1981-01-23 1983-01-19 Veeco Instruments Inc. Belichtungssystem für parallel geladenen teilchenstrahl

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2326279A1 (de) * 1973-05-23 1974-12-19 Siemens Ag Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation
GB1443215A (en) * 1973-11-07 1976-07-21 Mullard Ltd Electrostatically clamping a semiconductor wafer during device manufacture
JPS52119178A (en) * 1976-03-31 1977-10-06 Toshiba Corp Electron beam exposure device
US4194123A (en) * 1978-05-12 1980-03-18 Rockwell International Corporation Lithographic apparatus
US4338548A (en) * 1980-01-30 1982-07-06 Control Data Corporation Unipotential lens assembly for charged particle beam tubes and method for applying correction potentials thereto
US4465934A (en) * 1981-01-23 1984-08-14 Veeco Instruments Inc. Parallel charged particle beam exposure system
JPS57163955A (en) * 1981-02-25 1982-10-08 Toshiba Corp Mask focusing type color picture tube
US4354111A (en) * 1981-03-10 1982-10-12 Veeco Instruments Incorporated Screen lens array system
DE3138744A1 (de) * 1981-09-29 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleitervorrichtungen
US4667108A (en) * 1985-06-28 1987-05-19 Control Data Corporation Impedance matched and thermally cooled deflection amplifiers for charged particle beam apparatus employing deflectors
US5023458A (en) * 1989-01-04 1991-06-11 Eaton Corporation Ion beam control system
JPH05205695A (ja) * 1992-01-28 1993-08-13 Hitachi Ltd 多段多重電極及び質量分析装置
EP1171901B1 (de) * 2000-02-09 2008-10-08 Fei Company Mehrfachsäulen für fokussierte ionenstrahlen (fib) zur anwendung in der herstellung von nanostrukturen
JP2004134388A (ja) * 2002-08-13 2004-04-30 Leo Elektronenmikroskopie Gmbh 粒子光学装置、電子顕微鏡システムおよび電子リソグラフィーシステム
DE10237297A1 (de) * 2002-08-14 2004-03-11 Leo Elektronenmikroskopie Gmbh Teilchenoptische Vorrichtung, Elektronenmikroskopiesystem und Lithogrphiesystem
DE102004048892A1 (de) * 2004-10-06 2006-04-20 Leica Microsystems Lithography Gmbh Beleuchtungssystem für eine Korpuskularstrahleinrichtung und Verfahren zur Beleuchtung mit einem Korpuskularstrahl
JP2007287365A (ja) * 2006-04-13 2007-11-01 Jeol Ltd 多極子レンズ及び多極子レンズの製造方法
GB0700754D0 (en) * 2007-01-15 2007-02-21 Oxford Instr Analytical Ltd Charged particle analyser and method
GB2446184B (en) * 2007-01-31 2011-07-27 Microsaic Systems Ltd High performance micro-fabricated quadrupole lens
US8389950B2 (en) * 2007-01-31 2013-03-05 Microsaic Systems Plc High performance micro-fabricated quadrupole lens
JP7100152B2 (ja) 2018-05-01 2022-07-12 エーエスエムエル ネザーランズ ビー．ブイ． マルチビーム検査装置
CN110534385A (zh) * 2019-09-09 2019-12-03 中国科学院合肥物质科学研究院 一种具有整体膜电极棒的电四极透镜组

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US2941114A (en) * 1958-01-09 1960-06-14 Bell Telephone Labor Inc Slalom focusing structures
NL155980B (nl) * 1966-08-11 1978-02-15 Philips Nv Kathodestraalbuis met een vierpoollens voor de correctie van orthogonaliteitsfouten.
US3612946A (en) * 1967-08-01 1971-10-12 Murata Manufacturing Co Electron multiplier device using semiconductor ceramic

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0069728A1 (de) * 1981-01-23 1983-01-19 Veeco Instruments Inc. Belichtungssystem für parallel geladenen teilchenstrahl
EP0069728A4 (de) * 1981-01-23 1983-07-08 Veeco Instr Inc Belichtungssystem für parallel geladenen teilchenstrahl.

Also Published As

Publication number Publication date
NL7100748A (de) 1971-07-22
FR2122684A6 (de) 1972-09-01
DE2102608A1 (de) 1971-07-29
US3717785A (en) 1973-02-20
GB1305523A (de) 1973-02-07

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Legal Events

Date Code Title Description
ST Notification of lapse