FR2063255A5 - - Google Patents
Info
- Publication number
- FR2063255A5 FR2063255A5 FR6930468A FR6930468A FR2063255A5 FR 2063255 A5 FR2063255 A5 FR 2063255A5 FR 6930468 A FR6930468 A FR 6930468A FR 6930468 A FR6930468 A FR 6930468A FR 2063255 A5 FR2063255 A5 FR 2063255A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR6930468A FR2063255A5 (fr) | 1968-11-22 | 1969-09-08 | |
CH1512769A CH515609A (de) | 1968-11-22 | 1969-10-08 | Vorrichtung zur Herstellung dünner isolierender Schichten mittels Ionenzerstäubung |
GB55038/69A GB1292138A (en) | 1968-11-22 | 1969-11-11 | Method and apparatus for producing thin electrically insulating films by means of ion sputtering |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD13616168 | 1968-11-22 | ||
FR6930468A FR2063255A5 (fr) | 1968-11-22 | 1969-09-08 | |
GB55038/69A GB1292138A (en) | 1968-11-22 | 1969-11-11 | Method and apparatus for producing thin electrically insulating films by means of ion sputtering |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2063255A5 true FR2063255A5 (fr) | 1971-07-09 |
Family
ID=33457895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR6930468A Expired FR2063255A5 (fr) | 1968-11-22 | 1969-09-08 |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2063255A5 (fr) |
GB (1) | GB1292138A (fr) |
-
1969
- 1969-09-08 FR FR6930468A patent/FR2063255A5/fr not_active Expired
- 1969-11-11 GB GB55038/69A patent/GB1292138A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1292138A (en) | 1972-10-11 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |