FR2061207A5 - - Google Patents

Info

Publication number
FR2061207A5
FR2061207A5 FR7032799A FR7032799A FR2061207A5 FR 2061207 A5 FR2061207 A5 FR 2061207A5 FR 7032799 A FR7032799 A FR 7032799A FR 7032799 A FR7032799 A FR 7032799A FR 2061207 A5 FR2061207 A5 FR 2061207A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7032799A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Licentia Patent Verwaltungs GmbH
Original Assignee
Licentia Patent Verwaltungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Licentia Patent Verwaltungs GmbH filed Critical Licentia Patent Verwaltungs GmbH
Application granted granted Critical
Publication of FR2061207A5 publication Critical patent/FR2061207A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/061—Tipping system, e.g. by rotation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7032799A 1969-09-11 1970-09-09 Expired FR2061207A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691946049 DE1946049C3 (en) 1969-09-11 1969-09-11 Method and device for liquid phase epitaxy

Publications (1)

Publication Number Publication Date
FR2061207A5 true FR2061207A5 (en) 1971-06-18

Family

ID=5745230

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7032799A Expired FR2061207A5 (en) 1969-09-11 1970-09-09

Country Status (4)

Country Link
JP (2) JPS5010551B1 (en)
DE (1) DE1946049C3 (en)
FR (1) FR2061207A5 (en)
GB (1) GB1297315A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3741825A (en) * 1971-07-08 1973-06-26 Rca Corp Method of depositing an epitaxial semiconductor layer from the liquidphase
BE788374A (en) * 1971-12-08 1973-01-02 Rca Corp PROCESS FOR DEPOSITING AN EPITAXIAL LAYER OF A SEMICONDUCTOR MATERIAL ON THE SURFACE OF A SUBSTRATE

Also Published As

Publication number Publication date
JPS5010551B1 (en) 1975-04-22
JPS5228107B1 (en) 1977-07-25
DE1946049C3 (en) 1979-02-08
GB1297315A (en) 1972-11-22
DE1946049A1 (en) 1971-03-18
DE1946049B2 (en) 1978-06-08

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Legal Events

Date Code Title Description
ST Notification of lapse