FR2036831A1 - Reconstituting matter from ionised vapour - state - Google Patents
Reconstituting matter from ionised vapour - stateInfo
- Publication number
- FR2036831A1 FR2036831A1 FR6910602A FR6910602A FR2036831A1 FR 2036831 A1 FR2036831 A1 FR 2036831A1 FR 6910602 A FR6910602 A FR 6910602A FR 6910602 A FR6910602 A FR 6910602A FR 2036831 A1 FR2036831 A1 FR 2036831A1
- Authority
- FR
- France
- Prior art keywords
- raw material
- reconstituting
- matter
- state
- ionised
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Thin Magnetic Films (AREA)
Abstract
Reconstitution to a solid state, occurs as a coherent dense and implanted atomic layer of the raw material on the surface of a substrate. A magnetic field is made whose magnetic flux lines extend over the substrate surface and the molten raw material. Ions are formed from the molten material for precipitation on the substrate surface and the coherent solid atomic layer is formed under the continuous effect of the magnetic field which has been adapted to control the deposition direction of the ionised raw material.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19691917406 DE1917406A1 (en) | 1969-04-03 | 1969-04-03 | Process and device for material vapor deposition |
FR6910602A FR2036831A1 (en) | 1969-04-03 | 1969-04-04 | Reconstituting matter from ionised vapour - state |
NL6905343A NL6905343A (en) | 1969-04-03 | 1969-04-04 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19691917406 DE1917406A1 (en) | 1969-04-03 | 1969-04-03 | Process and device for material vapor deposition |
FR6910602A FR2036831A1 (en) | 1969-04-03 | 1969-04-04 | Reconstituting matter from ionised vapour - state |
NL6905343A NL6905343A (en) | 1969-04-03 | 1969-04-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2036831A1 true FR2036831A1 (en) | 1970-12-31 |
Family
ID=27181879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR6910602A Withdrawn FR2036831A1 (en) | 1969-04-03 | 1969-04-04 | Reconstituting matter from ionised vapour - state |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE1917406A1 (en) |
FR (1) | FR2036831A1 (en) |
NL (1) | NL6905343A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1981003669A1 (en) * | 1980-06-13 | 1981-12-24 | Science & Techn Ets | Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby |
FR2544746A1 (en) * | 1983-04-22 | 1984-10-26 | White Eng Corp | PURE IONIC PLATING PROCESS USING MAGNETIC FIELDS |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE393967B (en) * | 1974-11-29 | 1977-05-31 | Sateko Oy | PROCEDURE AND PERFORMANCE OF LAYING BETWEEN THE STORAGE IN A LABOR PACKAGE |
-
1969
- 1969-04-03 DE DE19691917406 patent/DE1917406A1/en active Pending
- 1969-04-04 FR FR6910602A patent/FR2036831A1/en not_active Withdrawn
- 1969-04-04 NL NL6905343A patent/NL6905343A/xx unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1981003669A1 (en) * | 1980-06-13 | 1981-12-24 | Science & Techn Ets | Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby |
FR2544746A1 (en) * | 1983-04-22 | 1984-10-26 | White Eng Corp | PURE IONIC PLATING PROCESS USING MAGNETIC FIELDS |
Also Published As
Publication number | Publication date |
---|---|
DE1917406A1 (en) | 1970-10-15 |
NL6905343A (en) | 1970-10-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |