AU448603B2 - Process for controlling the thickness ofa thin layer of semiconductor material and semiconductor substrate - Google Patents

Process for controlling the thickness ofa thin layer of semiconductor material and semiconductor substrate

Info

Publication number
AU448603B2
AU448603B2 AU62688/69A AU6268869A AU448603B2 AU 448603 B2 AU448603 B2 AU 448603B2 AU 62688/69 A AU62688/69 A AU 62688/69A AU 6268869 A AU6268869 A AU 6268869A AU 448603 B2 AU448603 B2 AU 448603B2
Authority
AU
Australia
Prior art keywords
controlling
thin layer
semiconductor substrate
semiconductor material
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU62688/69A
Other versions
AU6268869A (en
Inventor
Elwood Bean Kenneth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of AU448603B2 publication Critical patent/AU448603B2/en
Publication of AU6268869A publication Critical patent/AU6268869A/en
Expired legal-status Critical Current

Links

AU62688/69A 1968-12-31 1969-10-22 Process for controlling the thickness ofa thin layer of semiconductor material and semiconductor substrate Expired AU448603B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS788,167 1968-12-31

Publications (2)

Publication Number Publication Date
AU448603B2 true AU448603B2 (en) 1971-04-29
AU6268869A AU6268869A (en) 1971-04-29

Family

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