CA852899A - Production of thin layers of semiconductor material - Google Patents

Production of thin layers of semiconductor material

Info

Publication number
CA852899A
CA852899A CA852899A CA852899DA CA852899A CA 852899 A CA852899 A CA 852899A CA 852899 A CA852899 A CA 852899A CA 852899D A CA852899D A CA 852899DA CA 852899 A CA852899 A CA 852899A
Authority
CA
Canada
Prior art keywords
production
semiconductor material
thin layers
layers
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA852899A
Inventor
Zerbst Manfred
Sirtl Erhard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Publication date
Application granted granted Critical
Publication of CA852899A publication Critical patent/CA852899A/en
Expired legal-status Critical Current

Links

CA852899A Production of thin layers of semiconductor material Expired CA852899A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA852899T

Publications (1)

Publication Number Publication Date
CA852899A true CA852899A (en) 1970-09-29

Family

ID=36338533

Family Applications (1)

Application Number Title Priority Date Filing Date
CA852899A Expired CA852899A (en) Production of thin layers of semiconductor material

Country Status (1)

Country Link
CA (1) CA852899A (en)

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