CA816345A - Production of doped monocrystalline layers of semiconductor material - Google Patents

Production of doped monocrystalline layers of semiconductor material

Info

Publication number
CA816345A
CA816345A CA816345A CA816345DA CA816345A CA 816345 A CA816345 A CA 816345A CA 816345 A CA816345 A CA 816345A CA 816345D A CA816345D A CA 816345DA CA 816345 A CA816345 A CA 816345A
Authority
CA
Canada
Prior art keywords
production
semiconductor material
doped monocrystalline
monocrystalline layers
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA816345A
Inventor
Steggewentz Hermann
Schluter Kurt
Henker Heinz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Publication date
Application granted granted Critical
Publication of CA816345A publication Critical patent/CA816345A/en
Expired legal-status Critical Current

Links

CA816345A Production of doped monocrystalline layers of semiconductor material Expired CA816345A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA816345T

Publications (1)

Publication Number Publication Date
CA816345A true CA816345A (en) 1969-06-24

Family

ID=36288875

Family Applications (1)

Application Number Title Priority Date Filing Date
CA816345A Expired CA816345A (en) Production of doped monocrystalline layers of semiconductor material

Country Status (1)

Country Link
CA (1) CA816345A (en)

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