CA1016847A - Production of (iii)-orientated semiconductor monocrystalline rods - Google Patents

Production of (iii)-orientated semiconductor monocrystalline rods

Info

Publication number
CA1016847A
CA1016847A CA176,248A CA176248A CA1016847A CA 1016847 A CA1016847 A CA 1016847A CA 176248 A CA176248 A CA 176248A CA 1016847 A CA1016847 A CA 1016847A
Authority
CA
Canada
Prior art keywords
iii
production
semiconductor monocrystalline
orientated semiconductor
monocrystalline rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA176,248A
Other versions
CA176248S (en
Inventor
Wolfgang Keller
Alfred Muhlbauer
Konrad Reuschel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA1016847A publication Critical patent/CA1016847A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28Controlling or regulating
    • C30B13/30Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/004Sight-glasses therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913Rod, strand, filament or fiber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Silicon Compounds (AREA)
CA176,248A 1972-07-13 1973-07-12 Production of (iii)-orientated semiconductor monocrystalline rods Expired CA1016847A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2234512A DE2234512C3 (en) 1972-07-13 1972-07-13 Process for the production of (reoriented semiconductor single crystal rods with a specific resistance thawing towards the center of the rod

Publications (1)

Publication Number Publication Date
CA1016847A true CA1016847A (en) 1977-09-06

Family

ID=5850582

Family Applications (1)

Application Number Title Priority Date Filing Date
CA176,248A Expired CA1016847A (en) 1972-07-13 1973-07-12 Production of (iii)-orientated semiconductor monocrystalline rods

Country Status (10)

Country Link
US (1) US3915660A (en)
JP (1) JPS4953372A (en)
BE (1) BE802326A (en)
CA (1) CA1016847A (en)
DE (1) DE2234512C3 (en)
DK (1) DK143457C (en)
FR (1) FR2192870B1 (en)
GB (1) GB1375132A (en)
IT (1) IT992613B (en)
NL (1) NL7305060A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159967A (en) * 1974-06-17 1975-12-24
GB1542868A (en) * 1975-11-14 1979-03-28 Siemens Ag Production of phosphorus-doped monocrystalline silicon rods
JPS61117200A (en) * 1984-11-13 1986-06-04 Alps Electric Co Ltd Tellurium oxide whisker and its production
US6452211B1 (en) * 1997-06-10 2002-09-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor thin film and semiconductor device
EP1088912A1 (en) * 1999-09-28 2001-04-04 Forschungsverbund Berlin e.V. Growth in solution of compound or alloy crystals in a floating zone

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL243511A (en) * 1959-09-18
NL244489A (en) * 1959-10-19
NL301226A (en) * 1962-12-03
DE1218404B (en) * 1964-02-01 1966-06-08 Siemens Ag Method for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod
BE684801A (en) * 1965-08-05 1967-01-03

Also Published As

Publication number Publication date
DE2234512B2 (en) 1978-08-24
GB1375132A (en) 1974-11-27
FR2192870B1 (en) 1977-12-23
DE2234512A1 (en) 1974-01-24
JPS4953372A (en) 1974-05-23
NL7305060A (en) 1974-01-15
IT992613B (en) 1975-09-30
US3915660A (en) 1975-10-28
DK143457B (en) 1981-08-24
FR2192870A1 (en) 1974-02-15
BE802326A (en) 1973-11-05
DE2234512C3 (en) 1979-04-19
DK143457C (en) 1981-12-28

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