FR2028331A1 - - Google Patents
Info
- Publication number
- FR2028331A1 FR2028331A1 FR6941864A FR6941864A FR2028331A1 FR 2028331 A1 FR2028331 A1 FR 2028331A1 FR 6941864 A FR6941864 A FR 6941864A FR 6941864 A FR6941864 A FR 6941864A FR 2028331 A1 FR2028331 A1 FR 2028331A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
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- H10P14/6681—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US79121469A | 1969-01-15 | 1969-01-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2028331A1 true FR2028331A1 (show.php) | 1970-10-09 |
| FR2028331B1 FR2028331B1 (show.php) | 1974-03-01 |
Family
ID=25153001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR696941864A Expired FR2028331B1 (show.php) | 1969-01-15 | 1969-12-04 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3586554A (show.php) |
| DE (1) | DE2001339A1 (show.php) |
| FR (1) | FR2028331B1 (show.php) |
| GB (1) | GB1276286A (show.php) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3831432A (en) * | 1972-09-05 | 1974-08-27 | Texas Instruments Inc | Environment monitoring device and system |
| JPS5218098B2 (show.php) * | 1973-05-04 | 1977-05-19 | ||
| GB1513368A (en) * | 1974-07-08 | 1978-06-07 | Vickers Ltd | Processing of radiation-sensitive members |
| US4075367A (en) * | 1976-03-18 | 1978-02-21 | Ncr Corporation | Semiconductor processing of silicon nitride |
| US4173683A (en) * | 1977-06-13 | 1979-11-06 | Rca Corporation | Chemically treating the overcoat of a semiconductor device |
| US4209356A (en) * | 1978-10-18 | 1980-06-24 | General Electric Company | Selective etching of polymeric materials embodying silicones via reactor plasmas |
| DE3027941A1 (de) * | 1980-07-23 | 1982-02-25 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von reliefstrukturen aus doppellackschichten fuer integrierte halbleiterschaltungen, wobei zur strukturierung hochenergetische strahlung verwendet wird |
| CA1184321A (en) * | 1981-06-30 | 1985-03-19 | John C. Marinace | Adhesion of a photoresist to a substrate |
| JPS60147729A (ja) * | 1984-01-12 | 1985-08-03 | Toshiba Corp | ホトレジスト組成物 |
| JPS61248035A (ja) * | 1985-04-26 | 1986-11-05 | Nippon Zeon Co Ltd | 密着性の改良されたホトレジスト組成物 |
| CA2205549A1 (en) * | 1994-11-22 | 1996-05-30 | Craig M. Stauffer | Non-aminic photoresist adhesion promoters for microelectronic applications |
| US5641541A (en) * | 1995-09-29 | 1997-06-24 | Taiwan Semiconductor Manufacturing Company | Process to apply photoresist printer to a wafer |
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1969
- 1969-01-15 US US791214A patent/US3586554A/en not_active Expired - Lifetime
- 1969-12-04 FR FR696941864A patent/FR2028331B1/fr not_active Expired
-
1970
- 1970-01-01 GB GB033/70A patent/GB1276286A/en not_active Expired
- 1970-01-13 DE DE19702001339 patent/DE2001339A1/de active Pending
Non-Patent Citations (1)
| Title |
|---|
| NEANT * |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1276286A (en) | 1972-06-01 |
| FR2028331B1 (show.php) | 1974-03-01 |
| DE2001339A1 (de) | 1970-07-23 |
| US3586554A (en) | 1971-06-22 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |