FR2016830A1 - - Google Patents

Info

Publication number
FR2016830A1
FR2016830A1 FR6922103A FR6922103A FR2016830A1 FR 2016830 A1 FR2016830 A1 FR 2016830A1 FR 6922103 A FR6922103 A FR 6922103A FR 6922103 A FR6922103 A FR 6922103A FR 2016830 A1 FR2016830 A1 FR 2016830A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR6922103A
Other languages
French (fr)
Other versions
FR2016830B1 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of FR2016830A1 publication Critical patent/FR2016830A1/fr
Application granted granted Critical
Publication of FR2016830B1 publication Critical patent/FR2016830B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR6922103A 1968-07-29 1969-07-01 Expired FR2016830B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1144468A CH495432A (de) 1968-07-29 1968-07-29 Verfahren zum Herstellen einer zur Verdampfung von Stoffen dienenden Unterlage

Publications (2)

Publication Number Publication Date
FR2016830A1 true FR2016830A1 (de) 1970-05-15
FR2016830B1 FR2016830B1 (de) 1973-03-16

Family

ID=4373551

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6922103A Expired FR2016830B1 (de) 1968-07-29 1969-07-01

Country Status (6)

Country Link
AT (1) AT287429B (de)
CH (1) CH495432A (de)
DE (1) DE1928348A1 (de)
FR (1) FR2016830B1 (de)
GB (1) GB1215905A (de)
NL (1) NL6812072A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118941A (ja) * 1974-08-08 1976-02-14 Denki Kagaku Kogyo Kk Kinzokujohatsuyoyoki

Also Published As

Publication number Publication date
DE1928348A1 (de) 1970-02-12
FR2016830B1 (de) 1973-03-16
AT287429B (de) 1971-01-25
NL6812072A (de) 1970-02-02
GB1215905A (en) 1970-12-16
CH495432A (de) 1970-08-31

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Legal Events

Date Code Title Description
ST Notification of lapse