FR1594667A - - Google Patents

Info

Publication number
FR1594667A
FR1594667A FR1594667DA FR1594667A FR 1594667 A FR1594667 A FR 1594667A FR 1594667D A FR1594667D A FR 1594667DA FR 1594667 A FR1594667 A FR 1594667A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1594667A publication Critical patent/FR1594667A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR1594667D 1968-10-15 1968-10-15 Expired FR1594667A (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR170009 1968-10-15
FR170008 1968-10-15
FR170007 1968-10-15

Publications (1)

Publication Number Publication Date
FR1594667A true FR1594667A (de) 1970-06-08

Family

ID=27244897

Family Applications (3)

Application Number Title Priority Date Filing Date
FR1603217D Expired FR1603217A (de) 1968-10-15 1968-10-15
FR1594667D Expired FR1594667A (de) 1968-10-15 1968-10-15
FR1594668D Expired FR1594668A (de) 1968-10-15 1968-10-15

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FR1603217D Expired FR1603217A (de) 1968-10-15 1968-10-15

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR1594668D Expired FR1594668A (de) 1968-10-15 1968-10-15

Country Status (3)

Country Link
DE (1) DE1951735A1 (de)
FR (3) FR1603217A (de)
GB (1) GB1284781A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850312B2 (ja) * 1981-02-18 1983-11-09 株式会社日立製作所 スパツタリング装置
JPS6011103B2 (ja) * 1981-02-23 1985-03-23 レオニド パフロヴイツチ サブレフ 電弧金属蒸発装置用の消耗性陰極
GB2228948A (en) * 1989-02-28 1990-09-12 British Aerospace Fabrication of thin films from a composite target
GB9901093D0 (en) * 1999-01-20 1999-03-10 Marconi Electronic Syst Ltd Method of making coatings
US6635154B2 (en) * 2001-11-03 2003-10-21 Intevac, Inc. Method and apparatus for multi-target sputtering

Also Published As

Publication number Publication date
GB1284781A (en) 1972-08-09
FR1603217A (de) 1971-03-22
DE1951735A1 (de) 1970-04-30
FR1594668A (de) 1970-06-08

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Legal Events

Date Code Title Description
ST Notification of lapse