FR1594573A - - Google Patents

Info

Publication number
FR1594573A
FR1594573A FR1594573DA FR1594573A FR 1594573 A FR1594573 A FR 1594573A FR 1594573D A FR1594573D A FR 1594573DA FR 1594573 A FR1594573 A FR 1594573A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1594573A publication Critical patent/FR1594573A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • H01J37/141Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR1594573D 1967-08-18 1968-08-16 Expired FR1594573A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3825067 1967-08-18

Publications (1)

Publication Number Publication Date
FR1594573A true FR1594573A (xx) 1970-06-08

Family

ID=10402251

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1594573D Expired FR1594573A (xx) 1967-08-18 1968-08-16

Country Status (5)

Country Link
US (1) US3707628A (xx)
DE (1) DE1764835A1 (xx)
FR (1) FR1594573A (xx)
GB (1) GB1234183A (xx)
NL (1) NL6811733A (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0035445A2 (fr) * 1980-03-04 1981-09-09 C.G.R. MeV Dispositif accélérateur de particules chargées fonctionnant en ondes métriques

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1594465A (en) * 1977-03-23 1981-07-30 Nat Res Dev Electron beam apparatus
US4541890A (en) * 1982-06-01 1985-09-17 International Business Machines Corporation Hall ion generator for working surfaces with a low energy high intensity ion beam
JPS6091544A (ja) * 1983-10-24 1985-05-22 Anelva Corp オ−ジエ分析装置
JP2772821B2 (ja) * 1989-05-30 1998-07-09 セイコーインスツルメンツ株式会社 電子線装置
US5079428A (en) * 1989-08-31 1992-01-07 Bell Communications Research, Inc. Electron microscope with an asymmetrical immersion lens
JP2744823B2 (ja) * 1989-11-16 1998-04-28 日本電子株式会社 電子レンズ
US5311028A (en) * 1990-08-29 1994-05-10 Nissin Electric Co., Ltd. System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
JP2809917B2 (ja) * 1992-01-13 1998-10-15 富士通株式会社 荷電粒子ビーム露光方法および装置
JP2816458B2 (ja) * 1992-02-24 1998-10-27 株式会社村田製作所 鞍型偏向コイル
US7345287B2 (en) * 2005-09-30 2008-03-18 Applied Materials, Inc. Cooling module for charged particle beam column elements
US10486232B2 (en) * 2015-04-21 2019-11-26 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL145716B (nl) * 1964-06-06 1975-04-15 Philips Nv Elektronenstraalapparaat.
US3346736A (en) * 1964-09-22 1967-10-10 Applied Res Lab Inc Electron probe apparatus having an objective lens with an aperture for restricting fluid flow
US3374349A (en) * 1966-11-14 1968-03-19 Victor G. Macres Electron probe having a specific shortfocal length magnetic lens and light microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0035445A2 (fr) * 1980-03-04 1981-09-09 C.G.R. MeV Dispositif accélérateur de particules chargées fonctionnant en ondes métriques
FR2477827A1 (fr) * 1980-03-04 1981-09-11 Cgr Mev Dispositif accelerateur de particules chargees fonctionnant en ondes metriques
EP0035445B1 (fr) * 1980-03-04 1984-05-16 C.G.R. MeV Dispositif accélérateur de particules chargées fonctionnant en ondes métriques

Also Published As

Publication number Publication date
GB1234183A (xx) 1971-06-03
DE1764835A1 (de) 1971-11-04
US3707628A (en) 1972-12-26
NL6811733A (xx) 1969-02-20

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Legal Events

Date Code Title Description
ST Notification of lapse