FR1579159A - - Google Patents
Info
- Publication number
- FR1579159A FR1579159A FR1579159DA FR1579159A FR 1579159 A FR1579159 A FR 1579159A FR 1579159D A FR1579159D A FR 1579159DA FR 1579159 A FR1579159 A FR 1579159A
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/88—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters
- G06V10/89—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators
- G06V10/893—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators characterised by the kind of filter
- G06V10/895—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators characterised by the kind of filter the filter being related to phase processing, e.g. phase-only filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
- H01L21/0275—Photolithographic processes using lasers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Theoretical Computer Science (AREA)
- Multimedia (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Holo Graphy (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEP0042772 | 1967-08-05 | ||
DE19671572805 DE1572805B1 (de) | 1967-08-05 | 1967-08-05 | Verfahren zur Bildvervielfachung |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1579159A true FR1579159A (de) | 1969-08-22 |
Family
ID=25753128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1579159D Expired FR1579159A (de) | 1967-08-05 | 1968-08-05 |
Country Status (7)
Country | Link |
---|---|
AT (1) | AT293058B (de) |
BE (1) | BE719091A (de) |
CH (1) | CH509609A (de) |
DE (1) | DE1572805B1 (de) |
FR (1) | FR1579159A (de) |
GB (1) | GB1227151A (de) |
NL (1) | NL6810976A (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0526242A1 (de) * | 1991-08-02 | 1993-02-03 | Canon Kabushiki Kaisha | Bildprojektionsverfahren und Herstellungsverfahren von Halbleiterbauteilen unter Verwendung desselben |
US5574492A (en) * | 1992-03-27 | 1996-11-12 | Canon Kabushiki Kaisha | Imaging method and semiconductor device manufacturing method using the same |
US5587834A (en) * | 1992-01-31 | 1996-12-24 | Canon Kabushiki Kaisha | Semiconductor device manufacturing method and projection exposure apparatus using the same |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0266120A3 (de) * | 1986-10-31 | 1990-07-11 | AT&T Corp. | Erzeugung einer Anordnung von Lichtpunkten gleicher Intensität |
-
1967
- 1967-08-05 DE DE19671572805 patent/DE1572805B1/de not_active Withdrawn
-
1968
- 1968-08-01 NL NL6810976A patent/NL6810976A/xx unknown
- 1968-08-02 CH CH1160368A patent/CH509609A/de not_active IP Right Cessation
- 1968-08-02 GB GB1227151D patent/GB1227151A/en not_active Expired
- 1968-08-02 AT AT754468A patent/AT293058B/de not_active IP Right Cessation
- 1968-08-05 FR FR1579159D patent/FR1579159A/fr not_active Expired
- 1968-08-05 BE BE719091D patent/BE719091A/xx unknown
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0526242A1 (de) * | 1991-08-02 | 1993-02-03 | Canon Kabushiki Kaisha | Bildprojektionsverfahren und Herstellungsverfahren von Halbleiterbauteilen unter Verwendung desselben |
EP0614097A1 (de) * | 1991-08-02 | 1994-09-07 | Canon Kabushiki Kaisha | Bildprojektionsverfahren und Herstellungsverfahren von Halbleiterbauteilen unter Verwendung desselben |
US5608575A (en) * | 1991-08-02 | 1997-03-04 | Canon Kabushiki Kaisha | Image projection method and semiconductor device manufacturing method using the same |
US5631773A (en) * | 1991-08-02 | 1997-05-20 | Canon Kabushiki Kaisha | Image projection method and semiconductor device manufacturing method using the same |
US5587834A (en) * | 1992-01-31 | 1996-12-24 | Canon Kabushiki Kaisha | Semiconductor device manufacturing method and projection exposure apparatus using the same |
US5574492A (en) * | 1992-03-27 | 1996-11-12 | Canon Kabushiki Kaisha | Imaging method and semiconductor device manufacturing method using the same |
Also Published As
Publication number | Publication date |
---|---|
GB1227151A (de) | 1971-04-07 |
NL6810976A (de) | 1969-02-03 |
CH509609A (de) | 1971-06-30 |
AT293058B (de) | 1971-09-27 |
BE719091A (de) | 1969-02-05 |
DE1572805B1 (de) | 1970-08-27 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |