FR1557891A - - Google Patents

Info

Publication number
FR1557891A
FR1557891A FR135093A FR1557891DA FR1557891A FR 1557891 A FR1557891 A FR 1557891A FR 135093 A FR135093 A FR 135093A FR 1557891D A FR1557891D A FR 1557891DA FR 1557891 A FR1557891 A FR 1557891A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR135093A
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1557891A publication Critical patent/FR1557891A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
FR135093A 1968-01-05 1968-01-05 Expired FR1557891A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR135093 1968-01-05

Publications (1)

Publication Number Publication Date
FR1557891A true FR1557891A (zh) 1969-02-21

Family

ID=8644212

Family Applications (1)

Application Number Title Priority Date Filing Date
FR135093A Expired FR1557891A (zh) 1968-01-05 1968-01-05

Country Status (8)

Country Link
US (1) US3512369A (zh)
BE (1) BE725393A (zh)
DE (1) DE1900454A1 (zh)
ES (1) ES362123A1 (zh)
FR (1) FR1557891A (zh)
GB (1) GB1181750A (zh)
LU (1) LU57621A1 (zh)
NL (1) NL6900130A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2319035A1 (fr) * 1975-07-22 1977-02-18 Physimeca Appareil pour faire le vide a l'interieur d'une enceinte

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4907413A (en) * 1988-06-02 1990-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2737779A (en) * 1946-05-24 1956-03-13 Ernest O Lawrence Condensable vapor extraction apparatus
US3360949A (en) * 1965-09-20 1968-01-02 Air Reduction Cryopumping configuration
US3327491A (en) * 1966-06-08 1967-06-27 Andonian Associates Inc Windowless vacuum chamber for exposing a cooled device to successive samplers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2319035A1 (fr) * 1975-07-22 1977-02-18 Physimeca Appareil pour faire le vide a l'interieur d'une enceinte

Also Published As

Publication number Publication date
US3512369A (en) 1970-05-19
BE725393A (zh) 1969-05-16
ES362123A1 (es) 1970-11-01
LU57621A1 (zh) 1969-04-08
GB1181750A (en) 1970-02-18
DE1900454A1 (de) 1969-09-04
NL6900130A (zh) 1969-07-08

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Legal Events

Date Code Title Description
ST Notification of lapse